9/9/2010	9:56:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/9/2010	9:56:51 AM	Recipe started at 9:56 AM
9/9/2010	9:56:51 AM	H2 valve closed
9/9/2010	9:56:51 AM	BCl3 valve closed
9/9/2010	9:56:51 AM	PH3 valve closed
9/9/2010	9:56:51 AM	SiCl4 pre valve closed
9/9/2010	9:56:51 AM	SiCl4 post valve closed
9/9/2010	9:56:51 AM	Main Vac valve closed
9/9/2010	9:56:51 AM	Bypass valve closed
9/9/2010	9:56:51 AM	Bubbler valve closed
9/9/2010	9:56:51 AM	Helium valve opened
9/9/2010	9:56:51 AM	Helium MFC set to  500.000000
9/9/2010	9:56:51 AM	H2 MFC set to  0.000000
9/9/2010	9:56:51 AM	BCl3 MFC set to  0.000000
9/9/2010	9:56:51 AM	PHl3 MFC set to  0.000000
9/9/2010	9:56:51 AM	SiCl4 MFC set to  0.000000
9/9/2010	9:56:51 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	9:56:52 AM	Tube furnace set to 0
9/9/2010	9:58:11 AM	Helium valve closed
9/9/2010	9:58:11 AM	H2 valve closed
9/9/2010	9:58:11 AM	BCl3 valve closed
9/9/2010	9:58:11 AM	PH3 valve closed
9/9/2010	9:58:11 AM	SiCl4 pre valve closed
9/9/2010	9:58:11 AM	SiCl4 post valve closed
9/9/2010	9:58:11 AM	Main Vac valve closed
9/9/2010	9:58:11 AM	Bypass valve closed
9/9/2010	9:58:11 AM	Bubbler valve closed
9/9/2010	9:58:11 AM	Helium MFC set to  0.000000
9/9/2010	9:58:11 AM	H2 MFC set to  0.000000
9/9/2010	9:58:11 AM	BCl3 MFC set to  0.000000
9/9/2010	9:58:11 AM	PHl3 MFC set to  0.000000
9/9/2010	9:58:11 AM	SiCl4 MFC set to  0.000000
9/9/2010	9:58:11 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	9:58:12 AM	Tube furnace set to 0
9/9/2010	9:58:12 AM	Run finished at 9:58 AM
9/9/2010	9:58:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/9/2010	10:30:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/9/2010	10:30:30 AM	Recipe started at 10:30 AM
9/9/2010	10:30:30 AM	Helium valve closed
9/9/2010	10:30:30 AM	H2 valve closed
9/9/2010	10:30:30 AM	BCl3 valve closed
9/9/2010	10:30:30 AM	PH3 valve closed
9/9/2010	10:30:30 AM	SiCl4 pre valve closed
9/9/2010	10:30:30 AM	SiCl4 post valve closed
9/9/2010	10:30:30 AM	Main Vac valve closed
9/9/2010	10:30:30 AM	Bubbler valve closed
9/9/2010	10:30:30 AM	Bypass valve opened
9/9/2010	10:30:30 AM	Helium MFC set to  0.000000
9/9/2010	10:30:30 AM	H2 MFC set to  0.000000
9/9/2010	10:30:30 AM	BCl3 MFC set to  0.000000
9/9/2010	10:30:30 AM	PHl3 MFC set to  0.000000
9/9/2010	10:30:30 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:30:30 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:30:30 AM	Tube furnace set to 0
9/9/2010	10:31:12 AM	Helium valve closed
9/9/2010	10:31:12 AM	H2 valve closed
9/9/2010	10:31:12 AM	BCl3 valve closed
9/9/2010	10:31:12 AM	PH3 valve closed
9/9/2010	10:31:12 AM	SiCl4 pre valve closed
9/9/2010	10:31:12 AM	SiCl4 post valve closed
9/9/2010	10:31:12 AM	Bubbler valve closed
9/9/2010	10:31:12 AM	Main Vac valve opened
9/9/2010	10:31:12 AM	Bypass valve opened
9/9/2010	10:31:12 AM	Helium MFC set to  0.000000
9/9/2010	10:31:12 AM	H2 MFC set to  0.000000
9/9/2010	10:31:12 AM	BCl3 MFC set to  0.000000
9/9/2010	10:31:12 AM	PHl3 MFC set to  0.000000
9/9/2010	10:31:12 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:31:12 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:31:12 AM	Tube furnace set to 0
9/9/2010	10:31:12 AM	Run finished at 10:31 AM
9/9/2010	10:31:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/9/2010	10:32:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/9/2010	10:32:51 AM	Recipe started at 10:32 AM
9/9/2010	10:32:51 AM	Helium valve closed
9/9/2010	10:32:51 AM	H2 valve closed
9/9/2010	10:32:51 AM	BCl3 valve closed
9/9/2010	10:32:51 AM	PH3 valve closed
9/9/2010	10:32:51 AM	SiCl4 pre valve closed
9/9/2010	10:32:51 AM	SiCl4 post valve closed
9/9/2010	10:32:51 AM	Main Vac valve closed
9/9/2010	10:32:51 AM	Bubbler valve closed
9/9/2010	10:32:51 AM	Bypass valve opened
9/9/2010	10:32:52 AM	Helium MFC set to  0.000000
9/9/2010	10:32:52 AM	H2 MFC set to  0.000000
9/9/2010	10:32:52 AM	BCl3 MFC set to  0.000000
9/9/2010	10:32:52 AM	PHl3 MFC set to  0.000000
9/9/2010	10:32:52 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:32:52 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:32:52 AM	Tube furnace set to 0
9/9/2010	10:32:52 AM	Helium valve closed
9/9/2010	10:32:52 AM	H2 valve closed
9/9/2010	10:32:52 AM	BCl3 valve closed
9/9/2010	10:32:52 AM	PH3 valve closed
9/9/2010	10:32:52 AM	SiCl4 pre valve closed
9/9/2010	10:32:52 AM	SiCl4 post valve closed
9/9/2010	10:32:52 AM	Bubbler valve closed
9/9/2010	10:32:52 AM	Main Vac valve opened
9/9/2010	10:32:52 AM	Bypass valve opened
9/9/2010	10:32:52 AM	Helium MFC set to  0.000000
9/9/2010	10:32:52 AM	H2 MFC set to  0.000000
9/9/2010	10:32:52 AM	BCl3 MFC set to  0.000000
9/9/2010	10:32:52 AM	PHl3 MFC set to  0.000000
9/9/2010	10:32:52 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:32:52 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:32:52 AM	Tube furnace set to 0
9/9/2010	10:33:52 AM	H2 valve closed
9/9/2010	10:33:52 AM	BCl3 valve closed
9/9/2010	10:33:52 AM	PH3 valve closed
9/9/2010	10:33:52 AM	SiCl4 pre valve closed
9/9/2010	10:33:52 AM	SiCl4 post valve closed
9/9/2010	10:33:52 AM	Bubbler valve closed
9/9/2010	10:33:52 AM	Helium valve opened
9/9/2010	10:33:52 AM	Main Vac valve opened
9/9/2010	10:33:52 AM	Bypass valve opened
9/9/2010	10:33:52 AM	Helium MFC set to  100.000000
9/9/2010	10:33:52 AM	H2 MFC set to  0.000000
9/9/2010	10:33:52 AM	BCl3 MFC set to  0.000000
9/9/2010	10:33:52 AM	PHl3 MFC set to  0.000000
9/9/2010	10:33:52 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:33:52 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:33:52 AM	Tube furnace set to 0
9/9/2010	10:34:52 AM	Helium valve closed
9/9/2010	10:34:52 AM	H2 valve closed
9/9/2010	10:34:52 AM	BCl3 valve closed
9/9/2010	10:34:52 AM	PH3 valve closed
9/9/2010	10:34:52 AM	SiCl4 pre valve closed
9/9/2010	10:34:52 AM	SiCl4 post valve closed
9/9/2010	10:34:52 AM	Bubbler valve closed
9/9/2010	10:34:52 AM	Main Vac valve opened
9/9/2010	10:34:52 AM	Bypass valve opened
9/9/2010	10:34:52 AM	Helium MFC set to  0.000000
9/9/2010	10:34:52 AM	H2 MFC set to  0.000000
9/9/2010	10:34:52 AM	BCl3 MFC set to  0.000000
9/9/2010	10:34:52 AM	PHl3 MFC set to  0.000000
9/9/2010	10:34:52 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:34:52 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:34:53 AM	Tube furnace set to 0
9/9/2010	10:35:53 AM	H2 valve closed
9/9/2010	10:35:53 AM	BCl3 valve closed
9/9/2010	10:35:53 AM	PH3 valve closed
9/9/2010	10:35:53 AM	SiCl4 pre valve closed
9/9/2010	10:35:53 AM	SiCl4 post valve closed
9/9/2010	10:35:53 AM	Bubbler valve closed
9/9/2010	10:35:53 AM	Helium valve opened
9/9/2010	10:35:53 AM	Main Vac valve opened
9/9/2010	10:35:53 AM	Bypass valve opened
9/9/2010	10:35:53 AM	Helium MFC set to  100.000000
9/9/2010	10:35:53 AM	H2 MFC set to  0.000000
9/9/2010	10:35:53 AM	BCl3 MFC set to  0.000000
9/9/2010	10:35:53 AM	PHl3 MFC set to  0.000000
9/9/2010	10:35:53 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:35:53 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:35:53 AM	Tube furnace set to 0
9/9/2010	10:36:53 AM	Helium valve closed
9/9/2010	10:36:53 AM	H2 valve closed
9/9/2010	10:36:53 AM	BCl3 valve closed
9/9/2010	10:36:53 AM	PH3 valve closed
9/9/2010	10:36:53 AM	SiCl4 pre valve closed
9/9/2010	10:36:53 AM	SiCl4 post valve closed
9/9/2010	10:36:53 AM	Bubbler valve closed
9/9/2010	10:36:53 AM	Main Vac valve opened
9/9/2010	10:36:53 AM	Bypass valve opened
9/9/2010	10:36:53 AM	Helium MFC set to  0.000000
9/9/2010	10:36:53 AM	H2 MFC set to  0.000000
9/9/2010	10:36:53 AM	BCl3 MFC set to  0.000000
9/9/2010	10:36:53 AM	PHl3 MFC set to  0.000000
9/9/2010	10:36:53 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:36:53 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:36:53 AM	Tube furnace set to 0
9/9/2010	10:37:53 AM	H2 valve closed
9/9/2010	10:37:53 AM	BCl3 valve closed
9/9/2010	10:37:53 AM	PH3 valve closed
9/9/2010	10:37:53 AM	SiCl4 pre valve closed
9/9/2010	10:37:53 AM	SiCl4 post valve closed
9/9/2010	10:37:53 AM	Bubbler valve closed
9/9/2010	10:37:53 AM	Helium valve opened
9/9/2010	10:37:53 AM	Main Vac valve opened
9/9/2010	10:37:53 AM	Bypass valve opened
9/9/2010	10:37:53 AM	Helium MFC set to  100.000000
9/9/2010	10:37:53 AM	H2 MFC set to  0.000000
9/9/2010	10:37:53 AM	BCl3 MFC set to  0.000000
9/9/2010	10:37:53 AM	PHl3 MFC set to  0.000000
9/9/2010	10:37:53 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:37:53 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:37:53 AM	Tube furnace set to 0
9/9/2010	10:38:53 AM	Helium valve closed
9/9/2010	10:38:53 AM	H2 valve closed
9/9/2010	10:38:53 AM	BCl3 valve closed
9/9/2010	10:38:53 AM	PH3 valve closed
9/9/2010	10:38:53 AM	SiCl4 pre valve closed
9/9/2010	10:38:53 AM	SiCl4 post valve closed
9/9/2010	10:38:53 AM	Bubbler valve closed
9/9/2010	10:38:53 AM	Main Vac valve opened
9/9/2010	10:38:53 AM	Bypass valve opened
9/9/2010	10:38:53 AM	Helium MFC set to  0.000000
9/9/2010	10:38:53 AM	H2 MFC set to  0.000000
9/9/2010	10:38:53 AM	BCl3 MFC set to  0.000000
9/9/2010	10:38:53 AM	PHl3 MFC set to  0.000000
9/9/2010	10:38:53 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:38:53 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:38:54 AM	Tube furnace set to 0
9/9/2010	10:39:54 AM	H2 valve closed
9/9/2010	10:39:54 AM	BCl3 valve closed
9/9/2010	10:39:54 AM	PH3 valve closed
9/9/2010	10:39:54 AM	SiCl4 pre valve closed
9/9/2010	10:39:54 AM	SiCl4 post valve closed
9/9/2010	10:39:54 AM	Bubbler valve closed
9/9/2010	10:39:54 AM	Helium valve opened
9/9/2010	10:39:54 AM	Main Vac valve opened
9/9/2010	10:39:54 AM	Bypass valve opened
9/9/2010	10:39:54 AM	Helium MFC set to  100.000000
9/9/2010	10:39:54 AM	H2 MFC set to  0.000000
9/9/2010	10:39:54 AM	BCl3 MFC set to  0.000000
9/9/2010	10:39:54 AM	PHl3 MFC set to  0.000000
9/9/2010	10:39:54 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:39:54 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:39:54 AM	Tube furnace set to 0
9/9/2010	10:40:54 AM	Helium valve closed
9/9/2010	10:40:54 AM	H2 valve closed
9/9/2010	10:40:54 AM	BCl3 valve closed
9/9/2010	10:40:54 AM	PH3 valve closed
9/9/2010	10:40:54 AM	SiCl4 pre valve closed
9/9/2010	10:40:54 AM	SiCl4 post valve closed
9/9/2010	10:40:54 AM	Bubbler valve closed
9/9/2010	10:40:54 AM	Main Vac valve opened
9/9/2010	10:40:54 AM	Bypass valve opened
9/9/2010	10:40:54 AM	Helium MFC set to  0.000000
9/9/2010	10:40:54 AM	H2 MFC set to  0.000000
9/9/2010	10:40:54 AM	BCl3 MFC set to  0.000000
9/9/2010	10:40:54 AM	PHl3 MFC set to  0.000000
9/9/2010	10:40:54 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:40:54 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:40:54 AM	Tube furnace set to 0
9/9/2010	10:41:54 AM	H2 valve closed
9/9/2010	10:41:54 AM	BCl3 valve closed
9/9/2010	10:41:54 AM	PH3 valve closed
9/9/2010	10:41:54 AM	SiCl4 pre valve closed
9/9/2010	10:41:54 AM	SiCl4 post valve closed
9/9/2010	10:41:54 AM	Bubbler valve closed
9/9/2010	10:41:54 AM	Helium valve opened
9/9/2010	10:41:54 AM	Main Vac valve opened
9/9/2010	10:41:54 AM	Bypass valve opened
9/9/2010	10:41:54 AM	Helium MFC set to  100.000000
9/9/2010	10:41:54 AM	H2 MFC set to  0.000000
9/9/2010	10:41:54 AM	BCl3 MFC set to  0.000000
9/9/2010	10:41:54 AM	PHl3 MFC set to  0.000000
9/9/2010	10:41:54 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:41:54 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:41:54 AM	Tube furnace set to 0
9/9/2010	10:42:54 AM	Helium valve closed
9/9/2010	10:42:54 AM	H2 valve closed
9/9/2010	10:42:54 AM	BCl3 valve closed
9/9/2010	10:42:54 AM	PH3 valve closed
9/9/2010	10:42:54 AM	SiCl4 pre valve closed
9/9/2010	10:42:54 AM	SiCl4 post valve closed
9/9/2010	10:42:54 AM	Bubbler valve closed
9/9/2010	10:42:54 AM	Main Vac valve opened
9/9/2010	10:42:54 AM	Bypass valve opened
9/9/2010	10:42:54 AM	Helium MFC set to  0.000000
9/9/2010	10:42:54 AM	H2 MFC set to  0.000000
9/9/2010	10:42:54 AM	BCl3 MFC set to  0.000000
9/9/2010	10:42:54 AM	PHl3 MFC set to  0.000000
9/9/2010	10:42:54 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:42:54 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:42:54 AM	Tube furnace set to 0
9/9/2010	10:43:54 AM	H2 valve closed
9/9/2010	10:43:54 AM	BCl3 valve closed
9/9/2010	10:43:54 AM	PH3 valve closed
9/9/2010	10:43:54 AM	SiCl4 pre valve closed
9/9/2010	10:43:54 AM	SiCl4 post valve closed
9/9/2010	10:43:54 AM	Bubbler valve closed
9/9/2010	10:43:54 AM	Helium valve opened
9/9/2010	10:43:54 AM	Main Vac valve opened
9/9/2010	10:43:54 AM	Bypass valve opened
9/9/2010	10:43:54 AM	Helium MFC set to  100.000000
9/9/2010	10:43:54 AM	H2 MFC set to  0.000000
9/9/2010	10:43:54 AM	BCl3 MFC set to  0.000000
9/9/2010	10:43:54 AM	PHl3 MFC set to  0.000000
9/9/2010	10:43:54 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:43:54 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:43:55 AM	Tube furnace set to 0
9/9/2010	10:44:55 AM	Helium valve closed
9/9/2010	10:44:55 AM	H2 valve closed
9/9/2010	10:44:55 AM	BCl3 valve closed
9/9/2010	10:44:55 AM	PH3 valve closed
9/9/2010	10:44:55 AM	SiCl4 pre valve closed
9/9/2010	10:44:55 AM	SiCl4 post valve closed
9/9/2010	10:44:55 AM	Bubbler valve closed
9/9/2010	10:44:55 AM	Main Vac valve opened
9/9/2010	10:44:55 AM	Bypass valve opened
9/9/2010	10:44:55 AM	Helium MFC set to  0.000000
9/9/2010	10:44:55 AM	H2 MFC set to  0.000000
9/9/2010	10:44:55 AM	BCl3 MFC set to  0.000000
9/9/2010	10:44:55 AM	PHl3 MFC set to  0.000000
9/9/2010	10:44:55 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:44:55 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:44:55 AM	Tube furnace set to 0
9/9/2010	10:45:55 AM	H2 valve closed
9/9/2010	10:45:55 AM	BCl3 valve closed
9/9/2010	10:45:55 AM	PH3 valve closed
9/9/2010	10:45:55 AM	SiCl4 pre valve closed
9/9/2010	10:45:55 AM	SiCl4 post valve closed
9/9/2010	10:45:55 AM	Bubbler valve closed
9/9/2010	10:45:55 AM	Helium valve opened
9/9/2010	10:45:55 AM	Main Vac valve opened
9/9/2010	10:45:55 AM	Bypass valve opened
9/9/2010	10:45:55 AM	Helium MFC set to  100.000000
9/9/2010	10:45:55 AM	H2 MFC set to  0.000000
9/9/2010	10:45:55 AM	BCl3 MFC set to  0.000000
9/9/2010	10:45:55 AM	PHl3 MFC set to  0.000000
9/9/2010	10:45:55 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:45:55 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:45:55 AM	Tube furnace set to 0
9/9/2010	10:46:46 AM	Run aborted at 10:46 AM
9/9/2010	10:46:46 AM	Helium valve closed
9/9/2010	10:46:46 AM	H2 valve closed
9/9/2010	10:46:46 AM	BCl3 valve closed
9/9/2010	10:46:46 AM	PH3 valve closed
9/9/2010	10:46:46 AM	SiCl4 pre valve closed
9/9/2010	10:46:46 AM	SiCl4 post valve closed
9/9/2010	10:46:46 AM	Bypass valve closed
9/9/2010	10:46:46 AM	Main Vac valve closed
9/9/2010	10:46:46 AM	Bubbler valve closed
9/9/2010	10:46:46 AM	Helium MFC set to  0.000000
9/9/2010	10:46:46 AM	H2 MFC set to  0.000000
9/9/2010	10:46:46 AM	BCl3 MFC set to  0.000000
9/9/2010	10:46:46 AM	PHl3 MFC set to  0.000000
9/9/2010	10:46:46 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:46:46 AM	Tube furnace set to 0
9/9/2010	10:46:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/9/2010	10:46:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/9/2010	10:46:50 AM	Recipe started at 10:46 AM
9/9/2010	10:46:50 AM	Helium valve closed
9/9/2010	10:46:50 AM	H2 valve closed
9/9/2010	10:46:50 AM	BCl3 valve closed
9/9/2010	10:46:50 AM	PH3 valve closed
9/9/2010	10:46:50 AM	SiCl4 pre valve closed
9/9/2010	10:46:50 AM	SiCl4 post valve closed
9/9/2010	10:46:50 AM	Main Vac valve closed
9/9/2010	10:46:50 AM	Bubbler valve closed
9/9/2010	10:46:50 AM	Bypass valve opened
9/9/2010	10:46:50 AM	Helium MFC set to  0.000000
9/9/2010	10:46:50 AM	H2 MFC set to  0.000000
9/9/2010	10:46:50 AM	BCl3 MFC set to  0.000000
9/9/2010	10:46:50 AM	PHl3 MFC set to  0.000000
9/9/2010	10:46:50 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:46:50 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:46:50 AM	Tube furnace set to 0
9/9/2010	10:46:50 AM	Helium valve closed
9/9/2010	10:46:50 AM	H2 valve closed
9/9/2010	10:46:50 AM	BCl3 valve closed
9/9/2010	10:46:50 AM	PH3 valve closed
9/9/2010	10:46:50 AM	SiCl4 pre valve closed
9/9/2010	10:46:50 AM	SiCl4 post valve closed
9/9/2010	10:46:50 AM	Bubbler valve closed
9/9/2010	10:46:50 AM	Main Vac valve opened
9/9/2010	10:46:50 AM	Bypass valve opened
9/9/2010	10:46:50 AM	Helium MFC set to  0.000000
9/9/2010	10:46:50 AM	H2 MFC set to  0.000000
9/9/2010	10:46:50 AM	BCl3 MFC set to  0.000000
9/9/2010	10:46:50 AM	PHl3 MFC set to  0.000000
9/9/2010	10:46:50 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:46:50 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:46:51 AM	Tube furnace set to 0
9/9/2010	10:46:51 AM	Run finished at 10:46 AM
9/9/2010	10:46:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/9/2010	10:47:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/9/2010	10:47:57 AM	Recipe started at 10:47 AM
9/9/2010	10:47:57 AM	Helium valve closed
9/9/2010	10:47:57 AM	H2 valve closed
9/9/2010	10:47:57 AM	BCl3 valve closed
9/9/2010	10:47:57 AM	PH3 valve closed
9/9/2010	10:47:57 AM	SiCl4 pre valve closed
9/9/2010	10:47:57 AM	SiCl4 post valve closed
9/9/2010	10:47:57 AM	Main Vac valve closed
9/9/2010	10:47:57 AM	Bubbler valve closed
9/9/2010	10:47:57 AM	Bypass valve opened
9/9/2010	10:47:57 AM	Helium MFC set to  0.000000
9/9/2010	10:47:57 AM	H2 MFC set to  0.000000
9/9/2010	10:47:57 AM	BCl3 MFC set to  0.000000
9/9/2010	10:47:57 AM	PHl3 MFC set to  0.000000
9/9/2010	10:47:57 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:47:57 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:47:58 AM	Tube furnace set to 0
9/9/2010	10:47:58 AM	Helium valve closed
9/9/2010	10:47:58 AM	H2 valve closed
9/9/2010	10:47:58 AM	BCl3 valve closed
9/9/2010	10:47:58 AM	PH3 valve closed
9/9/2010	10:47:58 AM	SiCl4 pre valve closed
9/9/2010	10:47:58 AM	SiCl4 post valve closed
9/9/2010	10:47:58 AM	Bubbler valve closed
9/9/2010	10:47:58 AM	Main Vac valve opened
9/9/2010	10:47:58 AM	Bypass valve opened
9/9/2010	10:47:58 AM	Helium MFC set to  0.000000
9/9/2010	10:47:58 AM	H2 MFC set to  0.000000
9/9/2010	10:47:58 AM	BCl3 MFC set to  0.000000
9/9/2010	10:47:58 AM	PHl3 MFC set to  0.000000
9/9/2010	10:47:58 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:47:58 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:47:58 AM	Tube furnace set to 0
9/9/2010	10:48:58 AM	H2 valve closed
9/9/2010	10:48:58 AM	BCl3 valve closed
9/9/2010	10:48:58 AM	PH3 valve closed
9/9/2010	10:48:58 AM	SiCl4 pre valve closed
9/9/2010	10:48:58 AM	SiCl4 post valve closed
9/9/2010	10:48:58 AM	Bubbler valve closed
9/9/2010	10:48:58 AM	Helium valve opened
9/9/2010	10:48:58 AM	Main Vac valve opened
9/9/2010	10:48:58 AM	Bypass valve opened
9/9/2010	10:48:58 AM	Helium MFC set to  100.000000
9/9/2010	10:48:58 AM	H2 MFC set to  0.000000
9/9/2010	10:48:58 AM	BCl3 MFC set to  0.000000
9/9/2010	10:48:58 AM	PHl3 MFC set to  0.000000
9/9/2010	10:48:58 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:48:58 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:48:58 AM	Tube furnace set to 0
9/9/2010	10:49:58 AM	Helium valve closed
9/9/2010	10:49:58 AM	H2 valve closed
9/9/2010	10:49:58 AM	BCl3 valve closed
9/9/2010	10:49:58 AM	PH3 valve closed
9/9/2010	10:49:58 AM	SiCl4 pre valve closed
9/9/2010	10:49:58 AM	SiCl4 post valve closed
9/9/2010	10:49:58 AM	Bubbler valve closed
9/9/2010	10:49:58 AM	Main Vac valve opened
9/9/2010	10:49:58 AM	Bypass valve opened
9/9/2010	10:49:58 AM	Helium MFC set to  0.000000
9/9/2010	10:49:58 AM	H2 MFC set to  0.000000
9/9/2010	10:49:58 AM	BCl3 MFC set to  0.000000
9/9/2010	10:49:58 AM	PHl3 MFC set to  0.000000
9/9/2010	10:49:58 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:49:58 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:49:58 AM	Tube furnace set to 0
9/9/2010	10:50:59 AM	H2 valve closed
9/9/2010	10:50:59 AM	BCl3 valve closed
9/9/2010	10:50:59 AM	PH3 valve closed
9/9/2010	10:50:59 AM	SiCl4 pre valve closed
9/9/2010	10:50:59 AM	SiCl4 post valve closed
9/9/2010	10:50:59 AM	Bubbler valve closed
9/9/2010	10:50:59 AM	Helium valve opened
9/9/2010	10:50:59 AM	Main Vac valve opened
9/9/2010	10:50:59 AM	Bypass valve opened
9/9/2010	10:50:59 AM	Helium MFC set to  100.000000
9/9/2010	10:50:59 AM	H2 MFC set to  0.000000
9/9/2010	10:50:59 AM	BCl3 MFC set to  0.000000
9/9/2010	10:50:59 AM	PHl3 MFC set to  0.000000
9/9/2010	10:50:59 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:50:59 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:50:59 AM	Tube furnace set to 0
9/9/2010	10:51:59 AM	Helium valve closed
9/9/2010	10:51:59 AM	H2 valve closed
9/9/2010	10:51:59 AM	BCl3 valve closed
9/9/2010	10:51:59 AM	PH3 valve closed
9/9/2010	10:51:59 AM	SiCl4 pre valve closed
9/9/2010	10:51:59 AM	SiCl4 post valve closed
9/9/2010	10:51:59 AM	Bubbler valve closed
9/9/2010	10:51:59 AM	Main Vac valve opened
9/9/2010	10:51:59 AM	Bypass valve opened
9/9/2010	10:51:59 AM	Helium MFC set to  0.000000
9/9/2010	10:51:59 AM	H2 MFC set to  0.000000
9/9/2010	10:51:59 AM	BCl3 MFC set to  0.000000
9/9/2010	10:51:59 AM	PHl3 MFC set to  0.000000
9/9/2010	10:51:59 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:51:59 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:51:59 AM	Tube furnace set to 0
9/9/2010	10:52:59 AM	H2 valve closed
9/9/2010	10:52:59 AM	BCl3 valve closed
9/9/2010	10:52:59 AM	PH3 valve closed
9/9/2010	10:52:59 AM	SiCl4 pre valve closed
9/9/2010	10:52:59 AM	SiCl4 post valve closed
9/9/2010	10:52:59 AM	Bubbler valve closed
9/9/2010	10:52:59 AM	Helium valve opened
9/9/2010	10:52:59 AM	Main Vac valve opened
9/9/2010	10:52:59 AM	Bypass valve opened
9/9/2010	10:52:59 AM	Helium MFC set to  100.000000
9/9/2010	10:52:59 AM	H2 MFC set to  0.000000
9/9/2010	10:52:59 AM	BCl3 MFC set to  0.000000
9/9/2010	10:52:59 AM	PHl3 MFC set to  0.000000
9/9/2010	10:52:59 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:52:59 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:52:59 AM	Tube furnace set to 0
9/9/2010	10:53:59 AM	Helium valve closed
9/9/2010	10:53:59 AM	H2 valve closed
9/9/2010	10:53:59 AM	BCl3 valve closed
9/9/2010	10:53:59 AM	PH3 valve closed
9/9/2010	10:53:59 AM	SiCl4 pre valve closed
9/9/2010	10:53:59 AM	SiCl4 post valve closed
9/9/2010	10:53:59 AM	Bubbler valve closed
9/9/2010	10:53:59 AM	Main Vac valve opened
9/9/2010	10:53:59 AM	Bypass valve opened
9/9/2010	10:53:59 AM	Helium MFC set to  0.000000
9/9/2010	10:53:59 AM	H2 MFC set to  0.000000
9/9/2010	10:53:59 AM	BCl3 MFC set to  0.000000
9/9/2010	10:53:59 AM	PHl3 MFC set to  0.000000
9/9/2010	10:53:59 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:53:59 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:53:59 AM	Tube furnace set to 0
9/9/2010	10:54:59 AM	H2 valve closed
9/9/2010	10:54:59 AM	BCl3 valve closed
9/9/2010	10:54:59 AM	PH3 valve closed
9/9/2010	10:54:59 AM	SiCl4 pre valve closed
9/9/2010	10:54:59 AM	SiCl4 post valve closed
9/9/2010	10:54:59 AM	Bubbler valve closed
9/9/2010	10:54:59 AM	Helium valve opened
9/9/2010	10:54:59 AM	Main Vac valve opened
9/9/2010	10:54:59 AM	Bypass valve opened
9/9/2010	10:54:59 AM	Helium MFC set to  100.000000
9/9/2010	10:54:59 AM	H2 MFC set to  0.000000
9/9/2010	10:54:59 AM	BCl3 MFC set to  0.000000
9/9/2010	10:54:59 AM	PHl3 MFC set to  0.000000
9/9/2010	10:54:59 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:54:59 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:55:00 AM	Tube furnace set to 0
9/9/2010	10:56:00 AM	Helium valve closed
9/9/2010	10:56:00 AM	H2 valve closed
9/9/2010	10:56:00 AM	BCl3 valve closed
9/9/2010	10:56:00 AM	PH3 valve closed
9/9/2010	10:56:00 AM	SiCl4 pre valve closed
9/9/2010	10:56:00 AM	SiCl4 post valve closed
9/9/2010	10:56:00 AM	Bubbler valve closed
9/9/2010	10:56:00 AM	Main Vac valve opened
9/9/2010	10:56:00 AM	Bypass valve opened
9/9/2010	10:56:00 AM	Helium MFC set to  0.000000
9/9/2010	10:56:00 AM	H2 MFC set to  0.000000
9/9/2010	10:56:00 AM	BCl3 MFC set to  0.000000
9/9/2010	10:56:00 AM	PHl3 MFC set to  0.000000
9/9/2010	10:56:00 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:56:00 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:56:00 AM	Tube furnace set to 0
9/9/2010	10:57:00 AM	H2 valve closed
9/9/2010	10:57:00 AM	BCl3 valve closed
9/9/2010	10:57:00 AM	PH3 valve closed
9/9/2010	10:57:00 AM	SiCl4 pre valve closed
9/9/2010	10:57:00 AM	SiCl4 post valve closed
9/9/2010	10:57:00 AM	Bubbler valve closed
9/9/2010	10:57:00 AM	Helium valve opened
9/9/2010	10:57:00 AM	Main Vac valve opened
9/9/2010	10:57:00 AM	Bypass valve opened
9/9/2010	10:57:00 AM	Helium MFC set to  100.000000
9/9/2010	10:57:00 AM	H2 MFC set to  0.000000
9/9/2010	10:57:00 AM	BCl3 MFC set to  0.000000
9/9/2010	10:57:00 AM	PHl3 MFC set to  0.000000
9/9/2010	10:57:00 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:57:00 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:57:00 AM	Tube furnace set to 0
9/9/2010	10:58:00 AM	Helium valve closed
9/9/2010	10:58:00 AM	H2 valve closed
9/9/2010	10:58:00 AM	BCl3 valve closed
9/9/2010	10:58:00 AM	PH3 valve closed
9/9/2010	10:58:00 AM	SiCl4 pre valve closed
9/9/2010	10:58:00 AM	SiCl4 post valve closed
9/9/2010	10:58:00 AM	Bubbler valve closed
9/9/2010	10:58:00 AM	Main Vac valve opened
9/9/2010	10:58:00 AM	Bypass valve opened
9/9/2010	10:58:00 AM	Helium MFC set to  0.000000
9/9/2010	10:58:00 AM	H2 MFC set to  0.000000
9/9/2010	10:58:00 AM	BCl3 MFC set to  0.000000
9/9/2010	10:58:00 AM	PHl3 MFC set to  0.000000
9/9/2010	10:58:00 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:58:00 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:58:00 AM	Tube furnace set to 0
9/9/2010	10:59:00 AM	H2 valve closed
9/9/2010	10:59:00 AM	BCl3 valve closed
9/9/2010	10:59:00 AM	PH3 valve closed
9/9/2010	10:59:00 AM	SiCl4 pre valve closed
9/9/2010	10:59:00 AM	SiCl4 post valve closed
9/9/2010	10:59:00 AM	Bubbler valve closed
9/9/2010	10:59:00 AM	Helium valve opened
9/9/2010	10:59:00 AM	Main Vac valve opened
9/9/2010	10:59:00 AM	Bypass valve opened
9/9/2010	10:59:00 AM	Helium MFC set to  100.000000
9/9/2010	10:59:00 AM	H2 MFC set to  0.000000
9/9/2010	10:59:00 AM	BCl3 MFC set to  0.000000
9/9/2010	10:59:00 AM	PHl3 MFC set to  0.000000
9/9/2010	10:59:00 AM	SiCl4 MFC set to  0.000000
9/9/2010	10:59:00 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:59:00 AM	Tube furnace set to 0
9/9/2010	11:00:00 AM	Helium valve closed
9/9/2010	11:00:00 AM	H2 valve closed
9/9/2010	11:00:00 AM	BCl3 valve closed
9/9/2010	11:00:00 AM	PH3 valve closed
9/9/2010	11:00:00 AM	SiCl4 pre valve closed
9/9/2010	11:00:00 AM	SiCl4 post valve closed
9/9/2010	11:00:00 AM	Bubbler valve closed
9/9/2010	11:00:00 AM	Main Vac valve opened
9/9/2010	11:00:00 AM	Bypass valve opened
9/9/2010	11:00:00 AM	Helium MFC set to  0.000000
9/9/2010	11:00:00 AM	H2 MFC set to  0.000000
9/9/2010	11:00:00 AM	BCl3 MFC set to  0.000000
9/9/2010	11:00:00 AM	PHl3 MFC set to  0.000000
9/9/2010	11:00:00 AM	SiCl4 MFC set to  0.000000
9/9/2010	11:00:00 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	11:00:01 AM	Tube furnace set to 0
9/9/2010	11:01:01 AM	H2 valve closed
9/9/2010	11:01:01 AM	BCl3 valve closed
9/9/2010	11:01:01 AM	PH3 valve closed
9/9/2010	11:01:01 AM	SiCl4 pre valve closed
9/9/2010	11:01:01 AM	SiCl4 post valve closed
9/9/2010	11:01:01 AM	Bubbler valve closed
9/9/2010	11:01:01 AM	Helium valve opened
9/9/2010	11:01:01 AM	Main Vac valve opened
9/9/2010	11:01:01 AM	Bypass valve opened
9/9/2010	11:01:01 AM	Helium MFC set to  100.000000
9/9/2010	11:01:01 AM	H2 MFC set to  0.000000
9/9/2010	11:01:01 AM	BCl3 MFC set to  0.000000
9/9/2010	11:01:01 AM	PHl3 MFC set to  0.000000
9/9/2010	11:01:01 AM	SiCl4 MFC set to  0.000000
9/9/2010	11:01:01 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	11:01:01 AM	Tube furnace set to 0
9/9/2010	11:02:01 AM	Helium valve closed
9/9/2010	11:02:01 AM	H2 valve closed
9/9/2010	11:02:01 AM	BCl3 valve closed
9/9/2010	11:02:01 AM	PH3 valve closed
9/9/2010	11:02:01 AM	SiCl4 pre valve closed
9/9/2010	11:02:01 AM	SiCl4 post valve closed
9/9/2010	11:02:01 AM	Bubbler valve closed
9/9/2010	11:02:01 AM	Main Vac valve opened
9/9/2010	11:02:01 AM	Bypass valve opened
9/9/2010	11:02:01 AM	Helium MFC set to  0.000000
9/9/2010	11:02:01 AM	H2 MFC set to  0.000000
9/9/2010	11:02:01 AM	BCl3 MFC set to  0.000000
9/9/2010	11:02:01 AM	PHl3 MFC set to  0.000000
9/9/2010	11:02:01 AM	SiCl4 MFC set to  0.000000
9/9/2010	11:02:01 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	11:02:01 AM	Tube furnace set to 0
9/9/2010	11:03:01 AM	H2 valve closed
9/9/2010	11:03:01 AM	BCl3 valve closed
9/9/2010	11:03:01 AM	PH3 valve closed
9/9/2010	11:03:01 AM	SiCl4 pre valve closed
9/9/2010	11:03:01 AM	SiCl4 post valve closed
9/9/2010	11:03:01 AM	Bubbler valve closed
9/9/2010	11:03:01 AM	Helium valve opened
9/9/2010	11:03:01 AM	Main Vac valve opened
9/9/2010	11:03:01 AM	Bypass valve opened
9/9/2010	11:03:01 AM	Helium MFC set to  100.000000
9/9/2010	11:03:01 AM	H2 MFC set to  0.000000
9/9/2010	11:03:01 AM	BCl3 MFC set to  0.000000
9/9/2010	11:03:01 AM	PHl3 MFC set to  0.000000
9/9/2010	11:03:01 AM	SiCl4 MFC set to  0.000000
9/9/2010	11:03:01 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	11:03:01 AM	Tube furnace set to 0
9/9/2010	11:04:01 AM	Helium valve closed
9/9/2010	11:04:01 AM	H2 valve closed
9/9/2010	11:04:01 AM	BCl3 valve closed
9/9/2010	11:04:01 AM	PH3 valve closed
9/9/2010	11:04:01 AM	SiCl4 pre valve closed
9/9/2010	11:04:01 AM	SiCl4 post valve closed
9/9/2010	11:04:01 AM	Bubbler valve closed
9/9/2010	11:04:01 AM	Main Vac valve opened
9/9/2010	11:04:01 AM	Bypass valve opened
9/9/2010	11:04:01 AM	Helium MFC set to  0.000000
9/9/2010	11:04:01 AM	H2 MFC set to  0.000000
9/9/2010	11:04:01 AM	BCl3 MFC set to  0.000000
9/9/2010	11:04:01 AM	PHl3 MFC set to  0.000000
9/9/2010	11:04:01 AM	SiCl4 MFC set to  0.000000
9/9/2010	11:04:01 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	11:04:01 AM	Tube furnace set to 0
9/9/2010	11:05:01 AM	H2 valve closed
9/9/2010	11:05:01 AM	BCl3 valve closed
9/9/2010	11:05:01 AM	PH3 valve closed
9/9/2010	11:05:01 AM	SiCl4 pre valve closed
9/9/2010	11:05:01 AM	SiCl4 post valve closed
9/9/2010	11:05:01 AM	Bubbler valve closed
9/9/2010	11:05:01 AM	Helium valve opened
9/9/2010	11:05:01 AM	Main Vac valve opened
9/9/2010	11:05:01 AM	Bypass valve opened
9/9/2010	11:05:01 AM	Helium MFC set to  100.000000
9/9/2010	11:05:01 AM	H2 MFC set to  0.000000
9/9/2010	11:05:01 AM	BCl3 MFC set to  0.000000
9/9/2010	11:05:01 AM	PHl3 MFC set to  0.000000
9/9/2010	11:05:01 AM	SiCl4 MFC set to  0.000000
9/9/2010	11:05:01 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	11:05:02 AM	Tube furnace set to 0
9/9/2010	11:06:02 AM	Helium valve closed
9/9/2010	11:06:02 AM	H2 valve closed
9/9/2010	11:06:02 AM	BCl3 valve closed
9/9/2010	11:06:02 AM	PH3 valve closed
9/9/2010	11:06:02 AM	SiCl4 pre valve closed
9/9/2010	11:06:02 AM	SiCl4 post valve closed
9/9/2010	11:06:02 AM	Bubbler valve closed
9/9/2010	11:06:02 AM	Main Vac valve opened
9/9/2010	11:06:02 AM	Bypass valve opened
9/9/2010	11:06:02 AM	Helium MFC set to  0.000000
9/9/2010	11:06:02 AM	H2 MFC set to  0.000000
9/9/2010	11:06:02 AM	BCl3 MFC set to  0.000000
9/9/2010	11:06:02 AM	PHl3 MFC set to  0.000000
9/9/2010	11:06:02 AM	SiCl4 MFC set to  0.000000
9/9/2010	11:06:02 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	11:06:02 AM	Tube furnace set to 0
9/9/2010	11:07:02 AM	H2 valve closed
9/9/2010	11:07:02 AM	BCl3 valve closed
9/9/2010	11:07:02 AM	PH3 valve closed
9/9/2010	11:07:02 AM	SiCl4 pre valve closed
9/9/2010	11:07:02 AM	SiCl4 post valve closed
9/9/2010	11:07:02 AM	Bubbler valve closed
9/9/2010	11:07:02 AM	Helium valve opened
9/9/2010	11:07:02 AM	Main Vac valve opened
9/9/2010	11:07:02 AM	Bypass valve opened
9/9/2010	11:07:02 AM	Helium MFC set to  100.000000
9/9/2010	11:07:02 AM	H2 MFC set to  0.000000
9/9/2010	11:07:02 AM	BCl3 MFC set to  0.000000
9/9/2010	11:07:02 AM	PHl3 MFC set to  0.000000
9/9/2010	11:07:02 AM	SiCl4 MFC set to  0.000000
9/9/2010	11:07:02 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	11:07:02 AM	Tube furnace set to 0
9/9/2010	11:08:02 AM	Helium valve closed
9/9/2010	11:08:02 AM	H2 valve closed
9/9/2010	11:08:02 AM	BCl3 valve closed
9/9/2010	11:08:02 AM	PH3 valve closed
9/9/2010	11:08:02 AM	SiCl4 pre valve closed
9/9/2010	11:08:02 AM	SiCl4 post valve closed
9/9/2010	11:08:02 AM	Bubbler valve closed
9/9/2010	11:08:02 AM	Main Vac valve opened
9/9/2010	11:08:02 AM	Bypass valve opened
9/9/2010	11:08:02 AM	Helium MFC set to  0.000000
9/9/2010	11:08:02 AM	H2 MFC set to  0.000000
9/9/2010	11:08:02 AM	BCl3 MFC set to  0.000000
9/9/2010	11:08:02 AM	PHl3 MFC set to  0.000000
9/9/2010	11:08:02 AM	SiCl4 MFC set to  0.000000
9/9/2010	11:08:02 AM	Bypass solenoid MFC set to  0.000000
9/9/2010	11:08:02 AM	Tube furnace set to 0
9/9/2010	11:08:03 AM	Run finished at 11:08 AM
9/9/2010	11:08:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/9/2010	11:35:56 AM	Helium MFC set to  100.000000
9/9/2010	11:35:58 AM	Helium valve opened
9/9/2010	12:04:37 PM	Helium valve closed
9/9/2010	12:06:33 PM	Main Vac valve closed
9/9/2010	12:06:34 PM	Bypass valve closed
9/9/2010	12:06:51 PM	Bypass valve opened
9/9/2010	12:06:52 PM	Main Vac valve opened
9/9/2010	12:09:45 PM	Recipe started at 12:09 PM
9/9/2010	12:09:45 PM	Helium valve closed
9/9/2010	12:09:45 PM	BCl3 valve closed
9/9/2010	12:09:45 PM	PH3 valve closed
9/9/2010	12:09:45 PM	SiCl4 pre valve closed
9/9/2010	12:09:45 PM	SiCl4 post valve closed
9/9/2010	12:09:45 PM	Main Vac valve closed
9/9/2010	12:09:45 PM	Bypass valve closed
9/9/2010	12:09:45 PM	Bubbler valve closed
9/9/2010	12:09:45 PM	H2 valve opened
9/9/2010	12:09:45 PM	Helium MFC set to  0.000000
9/9/2010	12:09:45 PM	H2 MFC set to  500.000000
9/9/2010	12:09:45 PM	BCl3 MFC set to  0.000000
9/9/2010	12:09:45 PM	PHl3 MFC set to  0.000000
9/9/2010	12:09:45 PM	SiCl4 MFC set to  0.000000
9/9/2010	12:09:45 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	12:09:46 PM	Tube furnace set to 0
9/9/2010	12:11:09 PM	Helium valve closed
9/9/2010	12:11:09 PM	BCl3 valve closed
9/9/2010	12:11:09 PM	PH3 valve closed
9/9/2010	12:11:09 PM	SiCl4 pre valve closed
9/9/2010	12:11:09 PM	SiCl4 post valve closed
9/9/2010	12:11:09 PM	Main Vac valve closed
9/9/2010	12:11:09 PM	Bypass valve closed
9/9/2010	12:11:09 PM	H2 valve opened
9/9/2010	12:11:09 PM	Bubbler valve opened
9/9/2010	12:11:09 PM	Helium MFC set to  0.000000
9/9/2010	12:11:09 PM	H2 MFC set to  500.000000
9/9/2010	12:11:09 PM	BCl3 MFC set to  0.000000
9/9/2010	12:11:09 PM	PHl3 MFC set to  0.000000
9/9/2010	12:11:09 PM	SiCl4 MFC set to  0.000000
9/9/2010	12:11:09 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	12:11:09 PM	Tube furnace set to 1000
9/9/2010	12:31:09 PM	Helium valve closed
9/9/2010	12:31:09 PM	BCl3 valve closed
9/9/2010	12:31:09 PM	Main Vac valve closed
9/9/2010	12:31:09 PM	Bypass valve closed
9/9/2010	12:31:09 PM	H2 valve opened
9/9/2010	12:31:09 PM	PH3 valve opened
9/9/2010	12:31:09 PM	SiCl4 pre valve opened
9/9/2010	12:31:09 PM	SiCl4 post valve opened
9/9/2010	12:31:09 PM	Bubbler valve opened
9/9/2010	12:31:09 PM	Helium MFC set to  0.000000
9/9/2010	12:31:09 PM	H2 MFC set to  500.000000
9/9/2010	12:31:09 PM	BCl3 MFC set to  0.000000
9/9/2010	12:31:09 PM	PHl3 MFC set to  0.400000
9/9/2010	12:31:09 PM	SiCl4 MFC set to  50.000000
9/9/2010	12:31:09 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	12:31:09 PM	Tube furnace set to 1000
9/9/2010	12:51:09 PM	H2 valve closed
9/9/2010	12:51:09 PM	BCl3 valve closed
9/9/2010	12:51:09 PM	PH3 valve closed
9/9/2010	12:51:09 PM	SiCl4 pre valve closed
9/9/2010	12:51:09 PM	SiCl4 post valve closed
9/9/2010	12:51:09 PM	Main Vac valve closed
9/9/2010	12:51:09 PM	Bypass valve closed
9/9/2010	12:51:09 PM	Helium valve opened
9/9/2010	12:51:09 PM	Bubbler valve opened
9/9/2010	12:51:09 PM	Helium MFC set to  500.000000
9/9/2010	12:51:09 PM	H2 MFC set to  0.000000
9/9/2010	12:51:09 PM	BCl3 MFC set to  0.000000
9/9/2010	12:51:09 PM	PHl3 MFC set to  0.000000
9/9/2010	12:51:09 PM	SiCl4 MFC set to  0.000000
9/9/2010	12:51:09 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	12:51:09 PM	Tube furnace set to 0
9/9/2010	1:11:09 PM	Helium valve closed
9/9/2010	1:11:09 PM	H2 valve closed
9/9/2010	1:11:09 PM	BCl3 valve closed
9/9/2010	1:11:09 PM	PH3 valve closed
9/9/2010	1:11:09 PM	SiCl4 pre valve closed
9/9/2010	1:11:09 PM	SiCl4 post valve closed
9/9/2010	1:11:09 PM	Main Vac valve closed
9/9/2010	1:11:09 PM	Bypass valve closed
9/9/2010	1:11:09 PM	Bubbler valve closed
9/9/2010	1:11:09 PM	Helium MFC set to  0.000000
9/9/2010	1:11:09 PM	H2 MFC set to  0.000000
9/9/2010	1:11:09 PM	BCl3 MFC set to  0.000000
9/9/2010	1:11:09 PM	PHl3 MFC set to  0.000000
9/9/2010	1:11:09 PM	SiCl4 MFC set to  0.000000
9/9/2010	1:11:09 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	1:11:10 PM	Tube furnace set to 0
9/9/2010	1:11:10 PM	Run finished at 1:11 PM
9/9/2010	1:20:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/9/2010	1:20:57 PM	Recipe started at 1:20 PM
9/9/2010	1:20:57 PM	Helium valve closed
9/9/2010	1:20:57 PM	H2 valve closed
9/9/2010	1:20:57 PM	BCl3 valve closed
9/9/2010	1:20:57 PM	PH3 valve closed
9/9/2010	1:20:57 PM	SiCl4 pre valve closed
9/9/2010	1:20:57 PM	SiCl4 post valve closed
9/9/2010	1:20:57 PM	Main Vac valve closed
9/9/2010	1:20:57 PM	Bubbler valve closed
9/9/2010	1:20:57 PM	Bypass valve opened
9/9/2010	1:20:57 PM	Helium MFC set to  0.000000
9/9/2010	1:20:57 PM	H2 MFC set to  0.000000
9/9/2010	1:20:57 PM	BCl3 MFC set to  0.000000
9/9/2010	1:20:57 PM	PHl3 MFC set to  0.000000
9/9/2010	1:20:57 PM	SiCl4 MFC set to  0.000000
9/9/2010	1:20:57 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	1:20:57 PM	Tube furnace set to 0
9/9/2010	1:21:39 PM	Helium valve closed
9/9/2010	1:21:39 PM	H2 valve closed
9/9/2010	1:21:39 PM	BCl3 valve closed
9/9/2010	1:21:39 PM	PH3 valve closed
9/9/2010	1:21:39 PM	SiCl4 pre valve closed
9/9/2010	1:21:39 PM	SiCl4 post valve closed
9/9/2010	1:21:39 PM	Bubbler valve closed
9/9/2010	1:21:39 PM	Main Vac valve opened
9/9/2010	1:21:39 PM	Bypass valve opened
9/9/2010	1:21:39 PM	Helium MFC set to  0.000000
9/9/2010	1:21:39 PM	H2 MFC set to  0.000000
9/9/2010	1:21:39 PM	BCl3 MFC set to  0.000000
9/9/2010	1:21:39 PM	PHl3 MFC set to  0.000000
9/9/2010	1:21:39 PM	SiCl4 MFC set to  0.000000
9/9/2010	1:21:39 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	1:21:39 PM	Tube furnace set to 0
9/9/2010	1:21:39 PM	Run finished at 1:21 PM
9/9/2010	1:21:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/9/2010	1:22:41 PM	Helium MFC set to  100.000000
9/9/2010	1:22:44 PM	Helium valve opened
9/9/2010	1:56:23 PM	Helium valve closed
9/9/2010	1:59:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/9/2010	1:59:23 PM	Recipe started at 1:59 PM
9/9/2010	1:59:23 PM	Helium valve closed
9/9/2010	1:59:23 PM	H2 valve closed
9/9/2010	1:59:23 PM	BCl3 valve closed
9/9/2010	1:59:23 PM	PH3 valve closed
9/9/2010	1:59:23 PM	SiCl4 pre valve closed
9/9/2010	1:59:23 PM	SiCl4 post valve closed
9/9/2010	1:59:23 PM	Main Vac valve closed
9/9/2010	1:59:23 PM	Bubbler valve closed
9/9/2010	1:59:23 PM	Bypass valve opened
9/9/2010	1:59:23 PM	Helium MFC set to  0.000000
9/9/2010	1:59:23 PM	H2 MFC set to  0.000000
9/9/2010	1:59:23 PM	BCl3 MFC set to  0.000000
9/9/2010	1:59:23 PM	PHl3 MFC set to  0.000000
9/9/2010	1:59:23 PM	SiCl4 MFC set to  0.000000
9/9/2010	1:59:23 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	1:59:23 PM	Tube furnace set to 0
9/9/2010	1:59:24 PM	Helium valve closed
9/9/2010	1:59:24 PM	H2 valve closed
9/9/2010	1:59:24 PM	BCl3 valve closed
9/9/2010	1:59:24 PM	PH3 valve closed
9/9/2010	1:59:24 PM	SiCl4 pre valve closed
9/9/2010	1:59:24 PM	SiCl4 post valve closed
9/9/2010	1:59:24 PM	Bubbler valve closed
9/9/2010	1:59:24 PM	Main Vac valve opened
9/9/2010	1:59:24 PM	Bypass valve opened
9/9/2010	1:59:24 PM	Helium MFC set to  0.000000
9/9/2010	1:59:24 PM	H2 MFC set to  0.000000
9/9/2010	1:59:24 PM	BCl3 MFC set to  0.000000
9/9/2010	1:59:24 PM	PHl3 MFC set to  0.000000
9/9/2010	1:59:24 PM	SiCl4 MFC set to  0.000000
9/9/2010	1:59:24 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	1:59:24 PM	Tube furnace set to 0
9/9/2010	2:00:24 PM	H2 valve closed
9/9/2010	2:00:24 PM	BCl3 valve closed
9/9/2010	2:00:24 PM	PH3 valve closed
9/9/2010	2:00:24 PM	SiCl4 pre valve closed
9/9/2010	2:00:24 PM	SiCl4 post valve closed
9/9/2010	2:00:24 PM	Bubbler valve closed
9/9/2010	2:00:24 PM	Helium valve opened
9/9/2010	2:00:24 PM	Main Vac valve opened
9/9/2010	2:00:24 PM	Bypass valve opened
9/9/2010	2:00:24 PM	Helium MFC set to  100.000000
9/9/2010	2:00:24 PM	H2 MFC set to  0.000000
9/9/2010	2:00:24 PM	BCl3 MFC set to  0.000000
9/9/2010	2:00:24 PM	PHl3 MFC set to  0.000000
9/9/2010	2:00:24 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:00:24 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:00:24 PM	Tube furnace set to 0
9/9/2010	2:01:24 PM	Helium valve closed
9/9/2010	2:01:24 PM	H2 valve closed
9/9/2010	2:01:24 PM	BCl3 valve closed
9/9/2010	2:01:24 PM	PH3 valve closed
9/9/2010	2:01:24 PM	SiCl4 pre valve closed
9/9/2010	2:01:24 PM	SiCl4 post valve closed
9/9/2010	2:01:24 PM	Bubbler valve closed
9/9/2010	2:01:24 PM	Main Vac valve opened
9/9/2010	2:01:24 PM	Bypass valve opened
9/9/2010	2:01:24 PM	Helium MFC set to  0.000000
9/9/2010	2:01:24 PM	H2 MFC set to  0.000000
9/9/2010	2:01:24 PM	BCl3 MFC set to  0.000000
9/9/2010	2:01:24 PM	PHl3 MFC set to  0.000000
9/9/2010	2:01:24 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:01:24 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:01:24 PM	Tube furnace set to 0
9/9/2010	2:02:24 PM	H2 valve closed
9/9/2010	2:02:24 PM	BCl3 valve closed
9/9/2010	2:02:24 PM	PH3 valve closed
9/9/2010	2:02:24 PM	SiCl4 pre valve closed
9/9/2010	2:02:24 PM	SiCl4 post valve closed
9/9/2010	2:02:24 PM	Bubbler valve closed
9/9/2010	2:02:24 PM	Helium valve opened
9/9/2010	2:02:24 PM	Main Vac valve opened
9/9/2010	2:02:24 PM	Bypass valve opened
9/9/2010	2:02:24 PM	Helium MFC set to  100.000000
9/9/2010	2:02:24 PM	H2 MFC set to  0.000000
9/9/2010	2:02:24 PM	BCl3 MFC set to  0.000000
9/9/2010	2:02:24 PM	PHl3 MFC set to  0.000000
9/9/2010	2:02:24 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:02:24 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:02:24 PM	Tube furnace set to 0
9/9/2010	2:03:25 PM	Helium valve closed
9/9/2010	2:03:25 PM	H2 valve closed
9/9/2010	2:03:25 PM	BCl3 valve closed
9/9/2010	2:03:25 PM	PH3 valve closed
9/9/2010	2:03:25 PM	SiCl4 pre valve closed
9/9/2010	2:03:25 PM	SiCl4 post valve closed
9/9/2010	2:03:25 PM	Bubbler valve closed
9/9/2010	2:03:25 PM	Main Vac valve opened
9/9/2010	2:03:25 PM	Bypass valve opened
9/9/2010	2:03:25 PM	Helium MFC set to  0.000000
9/9/2010	2:03:25 PM	H2 MFC set to  0.000000
9/9/2010	2:03:25 PM	BCl3 MFC set to  0.000000
9/9/2010	2:03:25 PM	PHl3 MFC set to  0.000000
9/9/2010	2:03:25 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:03:25 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:03:25 PM	Tube furnace set to 0
9/9/2010	2:04:25 PM	H2 valve closed
9/9/2010	2:04:25 PM	BCl3 valve closed
9/9/2010	2:04:25 PM	PH3 valve closed
9/9/2010	2:04:25 PM	SiCl4 pre valve closed
9/9/2010	2:04:25 PM	SiCl4 post valve closed
9/9/2010	2:04:25 PM	Bubbler valve closed
9/9/2010	2:04:25 PM	Helium valve opened
9/9/2010	2:04:25 PM	Main Vac valve opened
9/9/2010	2:04:25 PM	Bypass valve opened
9/9/2010	2:04:25 PM	Helium MFC set to  100.000000
9/9/2010	2:04:25 PM	H2 MFC set to  0.000000
9/9/2010	2:04:25 PM	BCl3 MFC set to  0.000000
9/9/2010	2:04:25 PM	PHl3 MFC set to  0.000000
9/9/2010	2:04:25 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:04:25 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:04:25 PM	Tube furnace set to 0
9/9/2010	2:05:25 PM	Helium valve closed
9/9/2010	2:05:25 PM	H2 valve closed
9/9/2010	2:05:25 PM	BCl3 valve closed
9/9/2010	2:05:25 PM	PH3 valve closed
9/9/2010	2:05:25 PM	SiCl4 pre valve closed
9/9/2010	2:05:25 PM	SiCl4 post valve closed
9/9/2010	2:05:25 PM	Bubbler valve closed
9/9/2010	2:05:25 PM	Main Vac valve opened
9/9/2010	2:05:25 PM	Bypass valve opened
9/9/2010	2:05:25 PM	Helium MFC set to  0.000000
9/9/2010	2:05:25 PM	H2 MFC set to  0.000000
9/9/2010	2:05:25 PM	BCl3 MFC set to  0.000000
9/9/2010	2:05:25 PM	PHl3 MFC set to  0.000000
9/9/2010	2:05:25 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:05:25 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:05:25 PM	Tube furnace set to 0
9/9/2010	2:06:25 PM	H2 valve closed
9/9/2010	2:06:25 PM	BCl3 valve closed
9/9/2010	2:06:25 PM	PH3 valve closed
9/9/2010	2:06:25 PM	SiCl4 pre valve closed
9/9/2010	2:06:25 PM	SiCl4 post valve closed
9/9/2010	2:06:25 PM	Bubbler valve closed
9/9/2010	2:06:25 PM	Helium valve opened
9/9/2010	2:06:25 PM	Main Vac valve opened
9/9/2010	2:06:25 PM	Bypass valve opened
9/9/2010	2:06:25 PM	Helium MFC set to  100.000000
9/9/2010	2:06:25 PM	H2 MFC set to  0.000000
9/9/2010	2:06:25 PM	BCl3 MFC set to  0.000000
9/9/2010	2:06:25 PM	PHl3 MFC set to  0.000000
9/9/2010	2:06:25 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:06:25 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:06:25 PM	Tube furnace set to 0
9/9/2010	2:07:25 PM	Helium valve closed
9/9/2010	2:07:25 PM	H2 valve closed
9/9/2010	2:07:25 PM	BCl3 valve closed
9/9/2010	2:07:25 PM	PH3 valve closed
9/9/2010	2:07:25 PM	SiCl4 pre valve closed
9/9/2010	2:07:25 PM	SiCl4 post valve closed
9/9/2010	2:07:25 PM	Bubbler valve closed
9/9/2010	2:07:25 PM	Main Vac valve opened
9/9/2010	2:07:25 PM	Bypass valve opened
9/9/2010	2:07:25 PM	Helium MFC set to  0.000000
9/9/2010	2:07:25 PM	H2 MFC set to  0.000000
9/9/2010	2:07:25 PM	BCl3 MFC set to  0.000000
9/9/2010	2:07:25 PM	PHl3 MFC set to  0.000000
9/9/2010	2:07:25 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:07:25 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:07:26 PM	Tube furnace set to 0
9/9/2010	2:08:26 PM	H2 valve closed
9/9/2010	2:08:26 PM	BCl3 valve closed
9/9/2010	2:08:26 PM	PH3 valve closed
9/9/2010	2:08:26 PM	SiCl4 pre valve closed
9/9/2010	2:08:26 PM	SiCl4 post valve closed
9/9/2010	2:08:26 PM	Bubbler valve closed
9/9/2010	2:08:26 PM	Helium valve opened
9/9/2010	2:08:26 PM	Main Vac valve opened
9/9/2010	2:08:26 PM	Bypass valve opened
9/9/2010	2:08:26 PM	Helium MFC set to  100.000000
9/9/2010	2:08:26 PM	H2 MFC set to  0.000000
9/9/2010	2:08:26 PM	BCl3 MFC set to  0.000000
9/9/2010	2:08:26 PM	PHl3 MFC set to  0.000000
9/9/2010	2:08:26 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:08:26 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:08:26 PM	Tube furnace set to 0
9/9/2010	2:09:26 PM	Helium valve closed
9/9/2010	2:09:26 PM	H2 valve closed
9/9/2010	2:09:26 PM	BCl3 valve closed
9/9/2010	2:09:26 PM	PH3 valve closed
9/9/2010	2:09:26 PM	SiCl4 pre valve closed
9/9/2010	2:09:26 PM	SiCl4 post valve closed
9/9/2010	2:09:26 PM	Bubbler valve closed
9/9/2010	2:09:26 PM	Main Vac valve opened
9/9/2010	2:09:26 PM	Bypass valve opened
9/9/2010	2:09:26 PM	Helium MFC set to  0.000000
9/9/2010	2:09:26 PM	H2 MFC set to  0.000000
9/9/2010	2:09:26 PM	BCl3 MFC set to  0.000000
9/9/2010	2:09:26 PM	PHl3 MFC set to  0.000000
9/9/2010	2:09:26 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:09:26 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:09:26 PM	Tube furnace set to 0
9/9/2010	2:10:26 PM	H2 valve closed
9/9/2010	2:10:26 PM	BCl3 valve closed
9/9/2010	2:10:26 PM	PH3 valve closed
9/9/2010	2:10:26 PM	SiCl4 pre valve closed
9/9/2010	2:10:26 PM	SiCl4 post valve closed
9/9/2010	2:10:26 PM	Bubbler valve closed
9/9/2010	2:10:26 PM	Helium valve opened
9/9/2010	2:10:26 PM	Main Vac valve opened
9/9/2010	2:10:26 PM	Bypass valve opened
9/9/2010	2:10:26 PM	Helium MFC set to  100.000000
9/9/2010	2:10:26 PM	H2 MFC set to  0.000000
9/9/2010	2:10:26 PM	BCl3 MFC set to  0.000000
9/9/2010	2:10:26 PM	PHl3 MFC set to  0.000000
9/9/2010	2:10:26 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:10:26 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:10:26 PM	Tube furnace set to 0
9/9/2010	2:11:26 PM	Helium valve closed
9/9/2010	2:11:26 PM	H2 valve closed
9/9/2010	2:11:26 PM	BCl3 valve closed
9/9/2010	2:11:26 PM	PH3 valve closed
9/9/2010	2:11:26 PM	SiCl4 pre valve closed
9/9/2010	2:11:26 PM	SiCl4 post valve closed
9/9/2010	2:11:26 PM	Bubbler valve closed
9/9/2010	2:11:26 PM	Main Vac valve opened
9/9/2010	2:11:26 PM	Bypass valve opened
9/9/2010	2:11:26 PM	Helium MFC set to  0.000000
9/9/2010	2:11:26 PM	H2 MFC set to  0.000000
9/9/2010	2:11:26 PM	BCl3 MFC set to  0.000000
9/9/2010	2:11:26 PM	PHl3 MFC set to  0.000000
9/9/2010	2:11:26 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:11:26 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:11:26 PM	Tube furnace set to 0
9/9/2010	2:12:26 PM	H2 valve closed
9/9/2010	2:12:26 PM	BCl3 valve closed
9/9/2010	2:12:26 PM	PH3 valve closed
9/9/2010	2:12:26 PM	SiCl4 pre valve closed
9/9/2010	2:12:26 PM	SiCl4 post valve closed
9/9/2010	2:12:26 PM	Bubbler valve closed
9/9/2010	2:12:26 PM	Helium valve opened
9/9/2010	2:12:26 PM	Main Vac valve opened
9/9/2010	2:12:26 PM	Bypass valve opened
9/9/2010	2:12:26 PM	Helium MFC set to  100.000000
9/9/2010	2:12:26 PM	H2 MFC set to  0.000000
9/9/2010	2:12:26 PM	BCl3 MFC set to  0.000000
9/9/2010	2:12:26 PM	PHl3 MFC set to  0.000000
9/9/2010	2:12:26 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:12:26 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:12:27 PM	Tube furnace set to 0
9/9/2010	2:13:27 PM	Helium valve closed
9/9/2010	2:13:27 PM	H2 valve closed
9/9/2010	2:13:27 PM	BCl3 valve closed
9/9/2010	2:13:27 PM	PH3 valve closed
9/9/2010	2:13:27 PM	SiCl4 pre valve closed
9/9/2010	2:13:27 PM	SiCl4 post valve closed
9/9/2010	2:13:27 PM	Bubbler valve closed
9/9/2010	2:13:27 PM	Main Vac valve opened
9/9/2010	2:13:27 PM	Bypass valve opened
9/9/2010	2:13:27 PM	Helium MFC set to  0.000000
9/9/2010	2:13:27 PM	H2 MFC set to  0.000000
9/9/2010	2:13:27 PM	BCl3 MFC set to  0.000000
9/9/2010	2:13:27 PM	PHl3 MFC set to  0.000000
9/9/2010	2:13:27 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:13:27 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:13:27 PM	Tube furnace set to 0
9/9/2010	2:14:27 PM	H2 valve closed
9/9/2010	2:14:27 PM	BCl3 valve closed
9/9/2010	2:14:27 PM	PH3 valve closed
9/9/2010	2:14:27 PM	SiCl4 pre valve closed
9/9/2010	2:14:27 PM	SiCl4 post valve closed
9/9/2010	2:14:27 PM	Bubbler valve closed
9/9/2010	2:14:27 PM	Helium valve opened
9/9/2010	2:14:27 PM	Main Vac valve opened
9/9/2010	2:14:27 PM	Bypass valve opened
9/9/2010	2:14:27 PM	Helium MFC set to  100.000000
9/9/2010	2:14:27 PM	H2 MFC set to  0.000000
9/9/2010	2:14:27 PM	BCl3 MFC set to  0.000000
9/9/2010	2:14:27 PM	PHl3 MFC set to  0.000000
9/9/2010	2:14:27 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:14:27 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:14:27 PM	Tube furnace set to 0
9/9/2010	2:15:27 PM	Helium valve closed
9/9/2010	2:15:27 PM	H2 valve closed
9/9/2010	2:15:27 PM	BCl3 valve closed
9/9/2010	2:15:27 PM	PH3 valve closed
9/9/2010	2:15:27 PM	SiCl4 pre valve closed
9/9/2010	2:15:27 PM	SiCl4 post valve closed
9/9/2010	2:15:27 PM	Bubbler valve closed
9/9/2010	2:15:27 PM	Main Vac valve opened
9/9/2010	2:15:27 PM	Bypass valve opened
9/9/2010	2:15:27 PM	Helium MFC set to  0.000000
9/9/2010	2:15:27 PM	H2 MFC set to  0.000000
9/9/2010	2:15:27 PM	BCl3 MFC set to  0.000000
9/9/2010	2:15:27 PM	PHl3 MFC set to  0.000000
9/9/2010	2:15:27 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:15:27 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:15:27 PM	Tube furnace set to 0
9/9/2010	2:16:27 PM	H2 valve closed
9/9/2010	2:16:27 PM	BCl3 valve closed
9/9/2010	2:16:27 PM	PH3 valve closed
9/9/2010	2:16:27 PM	SiCl4 pre valve closed
9/9/2010	2:16:27 PM	SiCl4 post valve closed
9/9/2010	2:16:27 PM	Bubbler valve closed
9/9/2010	2:16:27 PM	Helium valve opened
9/9/2010	2:16:27 PM	Main Vac valve opened
9/9/2010	2:16:27 PM	Bypass valve opened
9/9/2010	2:16:27 PM	Helium MFC set to  100.000000
9/9/2010	2:16:27 PM	H2 MFC set to  0.000000
9/9/2010	2:16:27 PM	BCl3 MFC set to  0.000000
9/9/2010	2:16:27 PM	PHl3 MFC set to  0.000000
9/9/2010	2:16:27 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:16:27 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:16:27 PM	Tube furnace set to 0
9/9/2010	2:17:27 PM	Helium valve closed
9/9/2010	2:17:27 PM	H2 valve closed
9/9/2010	2:17:27 PM	BCl3 valve closed
9/9/2010	2:17:27 PM	PH3 valve closed
9/9/2010	2:17:27 PM	SiCl4 pre valve closed
9/9/2010	2:17:27 PM	SiCl4 post valve closed
9/9/2010	2:17:27 PM	Bubbler valve closed
9/9/2010	2:17:27 PM	Main Vac valve opened
9/9/2010	2:17:27 PM	Bypass valve opened
9/9/2010	2:17:27 PM	Helium MFC set to  0.000000
9/9/2010	2:17:27 PM	H2 MFC set to  0.000000
9/9/2010	2:17:27 PM	BCl3 MFC set to  0.000000
9/9/2010	2:17:27 PM	PHl3 MFC set to  0.000000
9/9/2010	2:17:27 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:17:27 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:17:28 PM	Tube furnace set to 0
9/9/2010	2:18:28 PM	H2 valve closed
9/9/2010	2:18:28 PM	BCl3 valve closed
9/9/2010	2:18:28 PM	PH3 valve closed
9/9/2010	2:18:28 PM	SiCl4 pre valve closed
9/9/2010	2:18:28 PM	SiCl4 post valve closed
9/9/2010	2:18:28 PM	Bubbler valve closed
9/9/2010	2:18:28 PM	Helium valve opened
9/9/2010	2:18:28 PM	Main Vac valve opened
9/9/2010	2:18:28 PM	Bypass valve opened
9/9/2010	2:18:28 PM	Helium MFC set to  100.000000
9/9/2010	2:18:28 PM	H2 MFC set to  0.000000
9/9/2010	2:18:28 PM	BCl3 MFC set to  0.000000
9/9/2010	2:18:28 PM	PHl3 MFC set to  0.000000
9/9/2010	2:18:28 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:18:28 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:18:28 PM	Tube furnace set to 0
9/9/2010	2:19:28 PM	Helium valve closed
9/9/2010	2:19:28 PM	H2 valve closed
9/9/2010	2:19:28 PM	BCl3 valve closed
9/9/2010	2:19:28 PM	PH3 valve closed
9/9/2010	2:19:28 PM	SiCl4 pre valve closed
9/9/2010	2:19:28 PM	SiCl4 post valve closed
9/9/2010	2:19:28 PM	Bubbler valve closed
9/9/2010	2:19:28 PM	Main Vac valve opened
9/9/2010	2:19:28 PM	Bypass valve opened
9/9/2010	2:19:28 PM	Helium MFC set to  0.000000
9/9/2010	2:19:28 PM	H2 MFC set to  0.000000
9/9/2010	2:19:28 PM	BCl3 MFC set to  0.000000
9/9/2010	2:19:28 PM	PHl3 MFC set to  0.000000
9/9/2010	2:19:28 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:19:28 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:19:28 PM	Tube furnace set to 0
9/9/2010	2:19:29 PM	Run finished at 2:19 PM
9/9/2010	2:19:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/9/2010	2:29:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/9/2010	2:29:18 PM	Recipe started at 2:29 PM
9/9/2010	2:29:18 PM	Helium valve closed
9/9/2010	2:29:18 PM	H2 valve closed
9/9/2010	2:29:18 PM	BCl3 valve closed
9/9/2010	2:29:18 PM	PH3 valve closed
9/9/2010	2:29:18 PM	SiCl4 pre valve closed
9/9/2010	2:29:18 PM	SiCl4 post valve closed
9/9/2010	2:29:18 PM	Main Vac valve closed
9/9/2010	2:29:18 PM	Bubbler valve closed
9/9/2010	2:29:18 PM	Bypass valve opened
9/9/2010	2:29:18 PM	Helium MFC set to  0.000000
9/9/2010	2:29:18 PM	H2 MFC set to  0.000000
9/9/2010	2:29:18 PM	BCl3 MFC set to  0.000000
9/9/2010	2:29:18 PM	PHl3 MFC set to  0.000000
9/9/2010	2:29:18 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:29:18 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:29:18 PM	Tube furnace set to 0
9/9/2010	2:29:18 PM	Helium valve closed
9/9/2010	2:29:18 PM	H2 valve closed
9/9/2010	2:29:18 PM	BCl3 valve closed
9/9/2010	2:29:18 PM	PH3 valve closed
9/9/2010	2:29:18 PM	SiCl4 pre valve closed
9/9/2010	2:29:18 PM	SiCl4 post valve closed
9/9/2010	2:29:18 PM	Bubbler valve closed
9/9/2010	2:29:18 PM	Main Vac valve opened
9/9/2010	2:29:18 PM	Bypass valve opened
9/9/2010	2:29:18 PM	Helium MFC set to  0.000000
9/9/2010	2:29:18 PM	H2 MFC set to  0.000000
9/9/2010	2:29:18 PM	BCl3 MFC set to  0.000000
9/9/2010	2:29:18 PM	PHl3 MFC set to  0.000000
9/9/2010	2:29:18 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:29:18 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:29:19 PM	Tube furnace set to 0
9/9/2010	2:30:19 PM	H2 valve closed
9/9/2010	2:30:19 PM	BCl3 valve closed
9/9/2010	2:30:19 PM	PH3 valve closed
9/9/2010	2:30:19 PM	SiCl4 pre valve closed
9/9/2010	2:30:19 PM	SiCl4 post valve closed
9/9/2010	2:30:19 PM	Bubbler valve closed
9/9/2010	2:30:19 PM	Helium valve opened
9/9/2010	2:30:19 PM	Main Vac valve opened
9/9/2010	2:30:19 PM	Bypass valve opened
9/9/2010	2:30:19 PM	Helium MFC set to  100.000000
9/9/2010	2:30:19 PM	H2 MFC set to  0.000000
9/9/2010	2:30:19 PM	BCl3 MFC set to  0.000000
9/9/2010	2:30:19 PM	PHl3 MFC set to  0.000000
9/9/2010	2:30:19 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:30:19 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:30:19 PM	Tube furnace set to 0
9/9/2010	2:31:19 PM	Helium valve closed
9/9/2010	2:31:19 PM	H2 valve closed
9/9/2010	2:31:19 PM	BCl3 valve closed
9/9/2010	2:31:19 PM	PH3 valve closed
9/9/2010	2:31:19 PM	SiCl4 pre valve closed
9/9/2010	2:31:19 PM	SiCl4 post valve closed
9/9/2010	2:31:19 PM	Bubbler valve closed
9/9/2010	2:31:19 PM	Main Vac valve opened
9/9/2010	2:31:19 PM	Bypass valve opened
9/9/2010	2:31:19 PM	Helium MFC set to  0.000000
9/9/2010	2:31:19 PM	H2 MFC set to  0.000000
9/9/2010	2:31:19 PM	BCl3 MFC set to  0.000000
9/9/2010	2:31:19 PM	PHl3 MFC set to  0.000000
9/9/2010	2:31:19 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:31:19 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:31:19 PM	Tube furnace set to 0
9/9/2010	2:32:19 PM	H2 valve closed
9/9/2010	2:32:19 PM	BCl3 valve closed
9/9/2010	2:32:19 PM	PH3 valve closed
9/9/2010	2:32:19 PM	SiCl4 pre valve closed
9/9/2010	2:32:19 PM	SiCl4 post valve closed
9/9/2010	2:32:19 PM	Bubbler valve closed
9/9/2010	2:32:19 PM	Helium valve opened
9/9/2010	2:32:19 PM	Main Vac valve opened
9/9/2010	2:32:19 PM	Bypass valve opened
9/9/2010	2:32:19 PM	Helium MFC set to  100.000000
9/9/2010	2:32:19 PM	H2 MFC set to  0.000000
9/9/2010	2:32:19 PM	BCl3 MFC set to  0.000000
9/9/2010	2:32:19 PM	PHl3 MFC set to  0.000000
9/9/2010	2:32:19 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:32:19 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:32:19 PM	Tube furnace set to 0
9/9/2010	2:33:19 PM	Helium valve closed
9/9/2010	2:33:19 PM	H2 valve closed
9/9/2010	2:33:19 PM	BCl3 valve closed
9/9/2010	2:33:19 PM	PH3 valve closed
9/9/2010	2:33:19 PM	SiCl4 pre valve closed
9/9/2010	2:33:19 PM	SiCl4 post valve closed
9/9/2010	2:33:19 PM	Bubbler valve closed
9/9/2010	2:33:19 PM	Main Vac valve opened
9/9/2010	2:33:19 PM	Bypass valve opened
9/9/2010	2:33:19 PM	Helium MFC set to  0.000000
9/9/2010	2:33:19 PM	H2 MFC set to  0.000000
9/9/2010	2:33:19 PM	BCl3 MFC set to  0.000000
9/9/2010	2:33:19 PM	PHl3 MFC set to  0.000000
9/9/2010	2:33:19 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:33:19 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:33:19 PM	Tube furnace set to 0
9/9/2010	2:34:19 PM	H2 valve closed
9/9/2010	2:34:19 PM	BCl3 valve closed
9/9/2010	2:34:19 PM	PH3 valve closed
9/9/2010	2:34:19 PM	SiCl4 pre valve closed
9/9/2010	2:34:19 PM	SiCl4 post valve closed
9/9/2010	2:34:19 PM	Bubbler valve closed
9/9/2010	2:34:19 PM	Helium valve opened
9/9/2010	2:34:19 PM	Main Vac valve opened
9/9/2010	2:34:19 PM	Bypass valve opened
9/9/2010	2:34:19 PM	Helium MFC set to  100.000000
9/9/2010	2:34:19 PM	H2 MFC set to  0.000000
9/9/2010	2:34:19 PM	BCl3 MFC set to  0.000000
9/9/2010	2:34:19 PM	PHl3 MFC set to  0.000000
9/9/2010	2:34:19 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:34:19 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:34:20 PM	Tube furnace set to 0
9/9/2010	2:35:20 PM	Helium valve closed
9/9/2010	2:35:20 PM	H2 valve closed
9/9/2010	2:35:20 PM	BCl3 valve closed
9/9/2010	2:35:20 PM	PH3 valve closed
9/9/2010	2:35:20 PM	SiCl4 pre valve closed
9/9/2010	2:35:20 PM	SiCl4 post valve closed
9/9/2010	2:35:20 PM	Bubbler valve closed
9/9/2010	2:35:20 PM	Main Vac valve opened
9/9/2010	2:35:20 PM	Bypass valve opened
9/9/2010	2:35:20 PM	Helium MFC set to  0.000000
9/9/2010	2:35:20 PM	H2 MFC set to  0.000000
9/9/2010	2:35:20 PM	BCl3 MFC set to  0.000000
9/9/2010	2:35:20 PM	PHl3 MFC set to  0.000000
9/9/2010	2:35:20 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:35:20 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:35:20 PM	Tube furnace set to 0
9/9/2010	2:36:20 PM	H2 valve closed
9/9/2010	2:36:20 PM	BCl3 valve closed
9/9/2010	2:36:20 PM	PH3 valve closed
9/9/2010	2:36:20 PM	SiCl4 pre valve closed
9/9/2010	2:36:20 PM	SiCl4 post valve closed
9/9/2010	2:36:20 PM	Bubbler valve closed
9/9/2010	2:36:20 PM	Helium valve opened
9/9/2010	2:36:20 PM	Main Vac valve opened
9/9/2010	2:36:20 PM	Bypass valve opened
9/9/2010	2:36:20 PM	Helium MFC set to  100.000000
9/9/2010	2:36:20 PM	H2 MFC set to  0.000000
9/9/2010	2:36:20 PM	BCl3 MFC set to  0.000000
9/9/2010	2:36:20 PM	PHl3 MFC set to  0.000000
9/9/2010	2:36:20 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:36:20 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:36:20 PM	Tube furnace set to 0
9/9/2010	2:37:20 PM	Helium valve closed
9/9/2010	2:37:20 PM	H2 valve closed
9/9/2010	2:37:20 PM	BCl3 valve closed
9/9/2010	2:37:20 PM	PH3 valve closed
9/9/2010	2:37:20 PM	SiCl4 pre valve closed
9/9/2010	2:37:20 PM	SiCl4 post valve closed
9/9/2010	2:37:20 PM	Bubbler valve closed
9/9/2010	2:37:20 PM	Main Vac valve opened
9/9/2010	2:37:20 PM	Bypass valve opened
9/9/2010	2:37:20 PM	Helium MFC set to  0.000000
9/9/2010	2:37:20 PM	H2 MFC set to  0.000000
9/9/2010	2:37:20 PM	BCl3 MFC set to  0.000000
9/9/2010	2:37:20 PM	PHl3 MFC set to  0.000000
9/9/2010	2:37:20 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:37:20 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:37:20 PM	Tube furnace set to 0
9/9/2010	2:38:20 PM	H2 valve closed
9/9/2010	2:38:20 PM	BCl3 valve closed
9/9/2010	2:38:20 PM	PH3 valve closed
9/9/2010	2:38:20 PM	SiCl4 pre valve closed
9/9/2010	2:38:20 PM	SiCl4 post valve closed
9/9/2010	2:38:20 PM	Bubbler valve closed
9/9/2010	2:38:20 PM	Helium valve opened
9/9/2010	2:38:20 PM	Main Vac valve opened
9/9/2010	2:38:20 PM	Bypass valve opened
9/9/2010	2:38:20 PM	Helium MFC set to  100.000000
9/9/2010	2:38:20 PM	H2 MFC set to  0.000000
9/9/2010	2:38:20 PM	BCl3 MFC set to  0.000000
9/9/2010	2:38:20 PM	PHl3 MFC set to  0.000000
9/9/2010	2:38:20 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:38:20 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:38:20 PM	Tube furnace set to 0
9/9/2010	2:39:20 PM	Helium valve closed
9/9/2010	2:39:20 PM	H2 valve closed
9/9/2010	2:39:20 PM	BCl3 valve closed
9/9/2010	2:39:20 PM	PH3 valve closed
9/9/2010	2:39:20 PM	SiCl4 pre valve closed
9/9/2010	2:39:20 PM	SiCl4 post valve closed
9/9/2010	2:39:20 PM	Bubbler valve closed
9/9/2010	2:39:20 PM	Main Vac valve opened
9/9/2010	2:39:20 PM	Bypass valve opened
9/9/2010	2:39:20 PM	Helium MFC set to  0.000000
9/9/2010	2:39:20 PM	H2 MFC set to  0.000000
9/9/2010	2:39:20 PM	BCl3 MFC set to  0.000000
9/9/2010	2:39:20 PM	PHl3 MFC set to  0.000000
9/9/2010	2:39:20 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:39:20 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:39:21 PM	Tube furnace set to 0
9/9/2010	2:40:21 PM	H2 valve closed
9/9/2010	2:40:21 PM	BCl3 valve closed
9/9/2010	2:40:21 PM	PH3 valve closed
9/9/2010	2:40:21 PM	SiCl4 pre valve closed
9/9/2010	2:40:21 PM	SiCl4 post valve closed
9/9/2010	2:40:21 PM	Bubbler valve closed
9/9/2010	2:40:21 PM	Helium valve opened
9/9/2010	2:40:21 PM	Main Vac valve opened
9/9/2010	2:40:21 PM	Bypass valve opened
9/9/2010	2:40:21 PM	Helium MFC set to  100.000000
9/9/2010	2:40:21 PM	H2 MFC set to  0.000000
9/9/2010	2:40:21 PM	BCl3 MFC set to  0.000000
9/9/2010	2:40:21 PM	PHl3 MFC set to  0.000000
9/9/2010	2:40:21 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:40:21 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:40:21 PM	Tube furnace set to 0
9/9/2010	2:41:21 PM	Helium valve closed
9/9/2010	2:41:21 PM	H2 valve closed
9/9/2010	2:41:21 PM	BCl3 valve closed
9/9/2010	2:41:21 PM	PH3 valve closed
9/9/2010	2:41:21 PM	SiCl4 pre valve closed
9/9/2010	2:41:21 PM	SiCl4 post valve closed
9/9/2010	2:41:21 PM	Bubbler valve closed
9/9/2010	2:41:21 PM	Main Vac valve opened
9/9/2010	2:41:21 PM	Bypass valve opened
9/9/2010	2:41:21 PM	Helium MFC set to  0.000000
9/9/2010	2:41:21 PM	H2 MFC set to  0.000000
9/9/2010	2:41:21 PM	BCl3 MFC set to  0.000000
9/9/2010	2:41:21 PM	PHl3 MFC set to  0.000000
9/9/2010	2:41:21 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:41:21 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:41:21 PM	Tube furnace set to 0
9/9/2010	2:42:21 PM	H2 valve closed
9/9/2010	2:42:21 PM	BCl3 valve closed
9/9/2010	2:42:21 PM	PH3 valve closed
9/9/2010	2:42:21 PM	SiCl4 pre valve closed
9/9/2010	2:42:21 PM	SiCl4 post valve closed
9/9/2010	2:42:21 PM	Bubbler valve closed
9/9/2010	2:42:21 PM	Helium valve opened
9/9/2010	2:42:21 PM	Main Vac valve opened
9/9/2010	2:42:21 PM	Bypass valve opened
9/9/2010	2:42:21 PM	Helium MFC set to  100.000000
9/9/2010	2:42:21 PM	H2 MFC set to  0.000000
9/9/2010	2:42:21 PM	BCl3 MFC set to  0.000000
9/9/2010	2:42:21 PM	PHl3 MFC set to  0.000000
9/9/2010	2:42:21 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:42:21 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:42:21 PM	Tube furnace set to 0
9/9/2010	2:43:21 PM	Helium valve closed
9/9/2010	2:43:21 PM	H2 valve closed
9/9/2010	2:43:21 PM	BCl3 valve closed
9/9/2010	2:43:21 PM	PH3 valve closed
9/9/2010	2:43:21 PM	SiCl4 pre valve closed
9/9/2010	2:43:21 PM	SiCl4 post valve closed
9/9/2010	2:43:21 PM	Bubbler valve closed
9/9/2010	2:43:21 PM	Main Vac valve opened
9/9/2010	2:43:21 PM	Bypass valve opened
9/9/2010	2:43:21 PM	Helium MFC set to  0.000000
9/9/2010	2:43:21 PM	H2 MFC set to  0.000000
9/9/2010	2:43:21 PM	BCl3 MFC set to  0.000000
9/9/2010	2:43:21 PM	PHl3 MFC set to  0.000000
9/9/2010	2:43:21 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:43:21 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:43:21 PM	Tube furnace set to 0
9/9/2010	2:44:21 PM	H2 valve closed
9/9/2010	2:44:21 PM	BCl3 valve closed
9/9/2010	2:44:21 PM	PH3 valve closed
9/9/2010	2:44:21 PM	SiCl4 pre valve closed
9/9/2010	2:44:21 PM	SiCl4 post valve closed
9/9/2010	2:44:21 PM	Bubbler valve closed
9/9/2010	2:44:21 PM	Helium valve opened
9/9/2010	2:44:21 PM	Main Vac valve opened
9/9/2010	2:44:21 PM	Bypass valve opened
9/9/2010	2:44:21 PM	Helium MFC set to  100.000000
9/9/2010	2:44:21 PM	H2 MFC set to  0.000000
9/9/2010	2:44:21 PM	BCl3 MFC set to  0.000000
9/9/2010	2:44:21 PM	PHl3 MFC set to  0.000000
9/9/2010	2:44:21 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:44:21 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:44:22 PM	Tube furnace set to 0
9/9/2010	2:45:22 PM	Helium valve closed
9/9/2010	2:45:22 PM	H2 valve closed
9/9/2010	2:45:22 PM	BCl3 valve closed
9/9/2010	2:45:22 PM	PH3 valve closed
9/9/2010	2:45:22 PM	SiCl4 pre valve closed
9/9/2010	2:45:22 PM	SiCl4 post valve closed
9/9/2010	2:45:22 PM	Bubbler valve closed
9/9/2010	2:45:22 PM	Main Vac valve opened
9/9/2010	2:45:22 PM	Bypass valve opened
9/9/2010	2:45:22 PM	Helium MFC set to  0.000000
9/9/2010	2:45:22 PM	H2 MFC set to  0.000000
9/9/2010	2:45:22 PM	BCl3 MFC set to  0.000000
9/9/2010	2:45:22 PM	PHl3 MFC set to  0.000000
9/9/2010	2:45:22 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:45:22 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:45:22 PM	Tube furnace set to 0
9/9/2010	2:46:22 PM	H2 valve closed
9/9/2010	2:46:22 PM	BCl3 valve closed
9/9/2010	2:46:22 PM	PH3 valve closed
9/9/2010	2:46:22 PM	SiCl4 pre valve closed
9/9/2010	2:46:22 PM	SiCl4 post valve closed
9/9/2010	2:46:22 PM	Bubbler valve closed
9/9/2010	2:46:22 PM	Helium valve opened
9/9/2010	2:46:22 PM	Main Vac valve opened
9/9/2010	2:46:22 PM	Bypass valve opened
9/9/2010	2:46:22 PM	Helium MFC set to  100.000000
9/9/2010	2:46:22 PM	H2 MFC set to  0.000000
9/9/2010	2:46:22 PM	BCl3 MFC set to  0.000000
9/9/2010	2:46:22 PM	PHl3 MFC set to  0.000000
9/9/2010	2:46:22 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:46:22 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:46:22 PM	Tube furnace set to 0
9/9/2010	2:47:22 PM	Helium valve closed
9/9/2010	2:47:22 PM	H2 valve closed
9/9/2010	2:47:22 PM	BCl3 valve closed
9/9/2010	2:47:22 PM	PH3 valve closed
9/9/2010	2:47:22 PM	SiCl4 pre valve closed
9/9/2010	2:47:22 PM	SiCl4 post valve closed
9/9/2010	2:47:22 PM	Bubbler valve closed
9/9/2010	2:47:22 PM	Main Vac valve opened
9/9/2010	2:47:22 PM	Bypass valve opened
9/9/2010	2:47:22 PM	Helium MFC set to  0.000000
9/9/2010	2:47:22 PM	H2 MFC set to  0.000000
9/9/2010	2:47:22 PM	BCl3 MFC set to  0.000000
9/9/2010	2:47:22 PM	PHl3 MFC set to  0.000000
9/9/2010	2:47:22 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:47:22 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:47:22 PM	Tube furnace set to 0
9/9/2010	2:48:22 PM	H2 valve closed
9/9/2010	2:48:22 PM	BCl3 valve closed
9/9/2010	2:48:22 PM	PH3 valve closed
9/9/2010	2:48:22 PM	SiCl4 pre valve closed
9/9/2010	2:48:22 PM	SiCl4 post valve closed
9/9/2010	2:48:22 PM	Bubbler valve closed
9/9/2010	2:48:22 PM	Helium valve opened
9/9/2010	2:48:22 PM	Main Vac valve opened
9/9/2010	2:48:22 PM	Bypass valve opened
9/9/2010	2:48:22 PM	Helium MFC set to  100.000000
9/9/2010	2:48:22 PM	H2 MFC set to  0.000000
9/9/2010	2:48:22 PM	BCl3 MFC set to  0.000000
9/9/2010	2:48:22 PM	PHl3 MFC set to  0.000000
9/9/2010	2:48:22 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:48:22 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:48:22 PM	Tube furnace set to 0
9/9/2010	2:49:23 PM	Helium valve closed
9/9/2010	2:49:23 PM	H2 valve closed
9/9/2010	2:49:23 PM	BCl3 valve closed
9/9/2010	2:49:23 PM	PH3 valve closed
9/9/2010	2:49:23 PM	SiCl4 pre valve closed
9/9/2010	2:49:23 PM	SiCl4 post valve closed
9/9/2010	2:49:23 PM	Bubbler valve closed
9/9/2010	2:49:23 PM	Main Vac valve opened
9/9/2010	2:49:23 PM	Bypass valve opened
9/9/2010	2:49:23 PM	Helium MFC set to  0.000000
9/9/2010	2:49:23 PM	H2 MFC set to  0.000000
9/9/2010	2:49:23 PM	BCl3 MFC set to  0.000000
9/9/2010	2:49:23 PM	PHl3 MFC set to  0.000000
9/9/2010	2:49:23 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:49:23 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:49:23 PM	Tube furnace set to 0
9/9/2010	2:49:24 PM	Run finished at 2:49 PM
9/9/2010	2:49:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/9/2010	2:49:58 PM	Helium MFC set to  100.000000
9/9/2010	2:49:59 PM	Helium valve opened
9/9/2010	2:57:19 PM	Helium valve closed
9/9/2010	2:58:23 PM	Bypass valve closed
9/9/2010	2:58:24 PM	Main Vac valve closed
9/9/2010	2:58:42 PM	Bypass valve opened
9/9/2010	2:58:42 PM	Main Vac valve opened
9/9/2010	2:59:25 PM	Recipe started at 2:59 PM
9/9/2010	2:59:25 PM	Helium valve closed
9/9/2010	2:59:25 PM	BCl3 valve closed
9/9/2010	2:59:25 PM	PH3 valve closed
9/9/2010	2:59:25 PM	SiCl4 pre valve closed
9/9/2010	2:59:25 PM	SiCl4 post valve closed
9/9/2010	2:59:25 PM	Main Vac valve closed
9/9/2010	2:59:25 PM	Bypass valve closed
9/9/2010	2:59:25 PM	Bubbler valve closed
9/9/2010	2:59:25 PM	H2 valve opened
9/9/2010	2:59:25 PM	Helium MFC set to  0.000000
9/9/2010	2:59:25 PM	H2 MFC set to  500.000000
9/9/2010	2:59:25 PM	BCl3 MFC set to  0.000000
9/9/2010	2:59:25 PM	PHl3 MFC set to  0.000000
9/9/2010	2:59:25 PM	SiCl4 MFC set to  0.000000
9/9/2010	2:59:25 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	2:59:25 PM	Tube furnace set to 0
9/9/2010	3:00:46 PM	Helium valve closed
9/9/2010	3:00:46 PM	BCl3 valve closed
9/9/2010	3:00:47 PM	PH3 valve closed
9/9/2010	3:00:47 PM	SiCl4 pre valve closed
9/9/2010	3:00:47 PM	SiCl4 post valve closed
9/9/2010	3:00:47 PM	Main Vac valve closed
9/9/2010	3:00:47 PM	Bypass valve closed
9/9/2010	3:00:47 PM	H2 valve opened
9/9/2010	3:00:47 PM	Bubbler valve opened
9/9/2010	3:00:47 PM	Helium MFC set to  0.000000
9/9/2010	3:00:47 PM	H2 MFC set to  500.000000
9/9/2010	3:00:47 PM	BCl3 MFC set to  0.000000
9/9/2010	3:00:47 PM	PHl3 MFC set to  0.000000
9/9/2010	3:00:47 PM	SiCl4 MFC set to  0.000000
9/9/2010	3:00:47 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	3:00:47 PM	Tube furnace set to 1000
9/9/2010	3:20:47 PM	Helium valve closed
9/9/2010	3:20:47 PM	BCl3 valve closed
9/9/2010	3:20:47 PM	Main Vac valve closed
9/9/2010	3:20:47 PM	Bypass valve closed
9/9/2010	3:20:47 PM	H2 valve opened
9/9/2010	3:20:47 PM	PH3 valve opened
9/9/2010	3:20:47 PM	SiCl4 pre valve opened
9/9/2010	3:20:47 PM	SiCl4 post valve opened
9/9/2010	3:20:47 PM	Bubbler valve opened
9/9/2010	3:20:47 PM	Helium MFC set to  0.000000
9/9/2010	3:20:47 PM	H2 MFC set to  500.000000
9/9/2010	3:20:47 PM	BCl3 MFC set to  0.000000
9/9/2010	3:20:47 PM	PHl3 MFC set to  1.000000
9/9/2010	3:20:47 PM	SiCl4 MFC set to  50.000000
9/9/2010	3:20:47 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	3:20:47 PM	Tube furnace set to 1000
9/9/2010	3:45:47 PM	H2 valve closed
9/9/2010	3:45:47 PM	BCl3 valve closed
9/9/2010	3:45:47 PM	PH3 valve closed
9/9/2010	3:45:47 PM	SiCl4 pre valve closed
9/9/2010	3:45:47 PM	SiCl4 post valve closed
9/9/2010	3:45:47 PM	Main Vac valve closed
9/9/2010	3:45:47 PM	Bypass valve closed
9/9/2010	3:45:47 PM	Helium valve opened
9/9/2010	3:45:47 PM	Bubbler valve opened
9/9/2010	3:45:47 PM	Helium MFC set to  500.000000
9/9/2010	3:45:47 PM	H2 MFC set to  0.000000
9/9/2010	3:45:47 PM	BCl3 MFC set to  0.000000
9/9/2010	3:45:47 PM	PHl3 MFC set to  0.000000
9/9/2010	3:45:47 PM	SiCl4 MFC set to  0.000000
9/9/2010	3:45:47 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	3:45:47 PM	Tube furnace set to 0
9/9/2010	4:05:47 PM	Helium valve closed
9/9/2010	4:05:47 PM	H2 valve closed
9/9/2010	4:05:47 PM	BCl3 valve closed
9/9/2010	4:05:47 PM	PH3 valve closed
9/9/2010	4:05:47 PM	SiCl4 pre valve closed
9/9/2010	4:05:47 PM	SiCl4 post valve closed
9/9/2010	4:05:47 PM	Main Vac valve closed
9/9/2010	4:05:47 PM	Bypass valve closed
9/9/2010	4:05:47 PM	Bubbler valve closed
9/9/2010	4:05:47 PM	Helium MFC set to  0.000000
9/9/2010	4:05:47 PM	H2 MFC set to  0.000000
9/9/2010	4:05:47 PM	BCl3 MFC set to  0.000000
9/9/2010	4:05:47 PM	PHl3 MFC set to  0.000000
9/9/2010	4:05:47 PM	SiCl4 MFC set to  0.000000
9/9/2010	4:05:47 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	4:05:47 PM	Tube furnace set to 0
9/9/2010	4:05:48 PM	Run finished at 4:05 PM
9/9/2010	4:12:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/9/2010	4:12:18 PM	Recipe started at 4:12 PM
9/9/2010	4:12:18 PM	Helium valve closed
9/9/2010	4:12:18 PM	H2 valve closed
9/9/2010	4:12:18 PM	BCl3 valve closed
9/9/2010	4:12:18 PM	PH3 valve closed
9/9/2010	4:12:18 PM	SiCl4 pre valve closed
9/9/2010	4:12:18 PM	SiCl4 post valve closed
9/9/2010	4:12:18 PM	Main Vac valve closed
9/9/2010	4:12:18 PM	Bubbler valve closed
9/9/2010	4:12:18 PM	Bypass valve opened
9/9/2010	4:12:18 PM	Helium MFC set to  0.000000
9/9/2010	4:12:18 PM	H2 MFC set to  0.000000
9/9/2010	4:12:18 PM	BCl3 MFC set to  0.000000
9/9/2010	4:12:18 PM	PHl3 MFC set to  0.000000
9/9/2010	4:12:18 PM	SiCl4 MFC set to  0.000000
9/9/2010	4:12:18 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	4:12:18 PM	Tube furnace set to 0
9/9/2010	4:12:59 PM	Helium valve closed
9/9/2010	4:12:59 PM	H2 valve closed
9/9/2010	4:12:59 PM	BCl3 valve closed
9/9/2010	4:12:59 PM	PH3 valve closed
9/9/2010	4:12:59 PM	SiCl4 pre valve closed
9/9/2010	4:12:59 PM	SiCl4 post valve closed
9/9/2010	4:12:59 PM	Bubbler valve closed
9/9/2010	4:12:59 PM	Main Vac valve opened
9/9/2010	4:12:59 PM	Bypass valve opened
9/9/2010	4:12:59 PM	Helium MFC set to  0.000000
9/9/2010	4:12:59 PM	H2 MFC set to  0.000000
9/9/2010	4:12:59 PM	BCl3 MFC set to  0.000000
9/9/2010	4:12:59 PM	PHl3 MFC set to  0.000000
9/9/2010	4:12:59 PM	SiCl4 MFC set to  0.000000
9/9/2010	4:12:59 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	4:12:59 PM	Tube furnace set to 0
9/9/2010	4:13:00 PM	Run finished at 4:13 PM
9/9/2010	4:13:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/9/2010	4:13:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/9/2010	4:13:41 PM	Recipe started at 4:13 PM
9/9/2010	4:13:41 PM	Helium valve closed
9/9/2010	4:13:41 PM	H2 valve closed
9/9/2010	4:13:41 PM	BCl3 valve closed
9/9/2010	4:13:41 PM	PH3 valve closed
9/9/2010	4:13:41 PM	SiCl4 pre valve closed
9/9/2010	4:13:41 PM	SiCl4 post valve closed
9/9/2010	4:13:41 PM	Main Vac valve closed
9/9/2010	4:13:41 PM	Bubbler valve closed
9/9/2010	4:13:41 PM	Bypass valve opened
9/9/2010	4:13:41 PM	Helium MFC set to  0.000000
9/9/2010	4:13:41 PM	H2 MFC set to  0.000000
9/9/2010	4:13:41 PM	BCl3 MFC set to  0.000000
9/9/2010	4:13:41 PM	PHl3 MFC set to  0.000000
9/9/2010	4:13:41 PM	SiCl4 MFC set to  0.000000
9/9/2010	4:13:41 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	4:13:41 PM	Tube furnace set to 0
9/9/2010	4:13:42 PM	Helium valve closed
9/9/2010	4:13:42 PM	H2 valve closed
9/9/2010	4:13:42 PM	BCl3 valve closed
9/9/2010	4:13:42 PM	PH3 valve closed
9/9/2010	4:13:42 PM	SiCl4 pre valve closed
9/9/2010	4:13:42 PM	SiCl4 post valve closed
9/9/2010	4:13:42 PM	Bubbler valve closed
9/9/2010	4:13:42 PM	Main Vac valve opened
9/9/2010	4:13:42 PM	Bypass valve opened
9/9/2010	4:13:42 PM	Helium MFC set to  0.000000
9/9/2010	4:13:42 PM	H2 MFC set to  0.000000
9/9/2010	4:13:42 PM	BCl3 MFC set to  0.000000
9/9/2010	4:13:42 PM	PHl3 MFC set to  0.000000
9/9/2010	4:13:42 PM	SiCl4 MFC set to  0.000000
9/9/2010	4:13:42 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	4:13:42 PM	Tube furnace set to 0
9/9/2010	4:14:42 PM	H2 valve closed
9/9/2010	4:14:42 PM	BCl3 valve closed
9/9/2010	4:14:42 PM	PH3 valve closed
9/9/2010	4:14:42 PM	SiCl4 pre valve closed
9/9/2010	4:14:42 PM	SiCl4 post valve closed
9/9/2010	4:14:42 PM	Bubbler valve closed
9/9/2010	4:14:42 PM	Helium valve opened
9/9/2010	4:14:42 PM	Main Vac valve opened
9/9/2010	4:14:42 PM	Bypass valve opened
9/9/2010	4:14:42 PM	Helium MFC set to  100.000000
9/9/2010	4:14:42 PM	H2 MFC set to  0.000000
9/9/2010	4:14:42 PM	BCl3 MFC set to  0.000000
9/9/2010	4:14:42 PM	PHl3 MFC set to  0.000000
9/9/2010	4:14:42 PM	SiCl4 MFC set to  0.000000
9/9/2010	4:14:42 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	4:14:42 PM	Tube furnace set to 0
9/9/2010	4:15:42 PM	Helium valve closed
9/9/2010	4:15:42 PM	H2 valve closed
9/9/2010	4:15:42 PM	BCl3 valve closed
9/9/2010	4:15:42 PM	PH3 valve closed
9/9/2010	4:15:42 PM	SiCl4 pre valve closed
9/9/2010	4:15:42 PM	SiCl4 post valve closed
9/9/2010	4:15:42 PM	Bubbler valve closed
9/9/2010	4:15:42 PM	Main Vac valve opened
9/9/2010	4:15:42 PM	Bypass valve opened
9/9/2010	4:15:42 PM	Helium MFC set to  0.000000
9/9/2010	4:15:42 PM	H2 MFC set to  0.000000
9/9/2010	4:15:42 PM	BCl3 MFC set to  0.000000
9/9/2010	4:15:42 PM	PHl3 MFC set to  0.000000
9/9/2010	4:15:42 PM	SiCl4 MFC set to  0.000000
9/9/2010	4:15:42 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	4:15:42 PM	Tube furnace set to 0
9/9/2010	4:16:42 PM	H2 valve closed
9/9/2010	4:16:42 PM	BCl3 valve closed
9/9/2010	4:16:42 PM	PH3 valve closed
9/9/2010	4:16:42 PM	SiCl4 pre valve closed
9/9/2010	4:16:42 PM	SiCl4 post valve closed
9/9/2010	4:16:42 PM	Bubbler valve closed
9/9/2010	4:16:42 PM	Helium valve opened
9/9/2010	4:16:42 PM	Main Vac valve opened
9/9/2010	4:16:42 PM	Bypass valve opened
9/9/2010	4:16:42 PM	Helium MFC set to  100.000000
9/9/2010	4:16:42 PM	H2 MFC set to  0.000000
9/9/2010	4:16:42 PM	BCl3 MFC set to  0.000000
9/9/2010	4:16:42 PM	PHl3 MFC set to  0.000000
9/9/2010	4:16:42 PM	SiCl4 MFC set to  0.000000
9/9/2010	4:16:42 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	4:16:42 PM	Tube furnace set to 0
9/9/2010	4:17:42 PM	Helium valve closed
9/9/2010	4:17:42 PM	H2 valve closed
9/9/2010	4:17:42 PM	BCl3 valve closed
9/9/2010	4:17:42 PM	PH3 valve closed
9/9/2010	4:17:42 PM	SiCl4 pre valve closed
9/9/2010	4:17:42 PM	SiCl4 post valve closed
9/9/2010	4:17:42 PM	Bubbler valve closed
9/9/2010	4:17:42 PM	Main Vac valve opened
9/9/2010	4:17:42 PM	Bypass valve opened
9/9/2010	4:17:42 PM	Helium MFC set to  0.000000
9/9/2010	4:17:42 PM	H2 MFC set to  0.000000
9/9/2010	4:17:42 PM	BCl3 MFC set to  0.000000
9/9/2010	4:17:42 PM	PHl3 MFC set to  0.000000
9/9/2010	4:17:42 PM	SiCl4 MFC set to  0.000000
9/9/2010	4:17:42 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	4:17:43 PM	Tube furnace set to 0
9/9/2010	4:18:43 PM	H2 valve closed
9/9/2010	4:18:43 PM	BCl3 valve closed
9/9/2010	4:18:43 PM	PH3 valve closed
9/9/2010	4:18:43 PM	SiCl4 pre valve closed
9/9/2010	4:18:43 PM	SiCl4 post valve closed
9/9/2010	4:18:43 PM	Bubbler valve closed
9/9/2010	4:18:43 PM	Helium valve opened
9/9/2010	4:18:43 PM	Main Vac valve opened
9/9/2010	4:18:43 PM	Bypass valve opened
9/9/2010	4:18:43 PM	Helium MFC set to  100.000000
9/9/2010	4:18:43 PM	H2 MFC set to  0.000000
9/9/2010	4:18:43 PM	BCl3 MFC set to  0.000000
9/9/2010	4:18:43 PM	PHl3 MFC set to  0.000000
9/9/2010	4:18:43 PM	SiCl4 MFC set to  0.000000
9/9/2010	4:18:43 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	4:18:43 PM	Tube furnace set to 0
9/9/2010	4:19:43 PM	Helium valve closed
9/9/2010	4:19:43 PM	H2 valve closed
9/9/2010	4:19:43 PM	BCl3 valve closed
9/9/2010	4:19:43 PM	PH3 valve closed
9/9/2010	4:19:43 PM	SiCl4 pre valve closed
9/9/2010	4:19:43 PM	SiCl4 post valve closed
9/9/2010	4:19:43 PM	Bubbler valve closed
9/9/2010	4:19:43 PM	Main Vac valve opened
9/9/2010	4:19:43 PM	Bypass valve opened
9/9/2010	4:19:43 PM	Helium MFC set to  0.000000
9/9/2010	4:19:43 PM	H2 MFC set to  0.000000
9/9/2010	4:19:43 PM	BCl3 MFC set to  0.000000
9/9/2010	4:19:43 PM	PHl3 MFC set to  0.000000
9/9/2010	4:19:43 PM	SiCl4 MFC set to  0.000000
9/9/2010	4:19:43 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	4:19:43 PM	Tube furnace set to 0
9/9/2010	4:20:43 PM	H2 valve closed
9/9/2010	4:20:43 PM	BCl3 valve closed
9/9/2010	4:20:43 PM	PH3 valve closed
9/9/2010	4:20:43 PM	SiCl4 pre valve closed
9/9/2010	4:20:43 PM	SiCl4 post valve closed
9/9/2010	4:20:43 PM	Bubbler valve closed
9/9/2010	4:20:43 PM	Helium valve opened
9/9/2010	4:20:43 PM	Main Vac valve opened
9/9/2010	4:20:43 PM	Bypass valve opened
9/9/2010	4:20:43 PM	Helium MFC set to  100.000000
9/9/2010	4:20:43 PM	H2 MFC set to  0.000000
9/9/2010	4:20:43 PM	BCl3 MFC set to  0.000000
9/9/2010	4:20:43 PM	PHl3 MFC set to  0.000000
9/9/2010	4:20:43 PM	SiCl4 MFC set to  0.000000
9/9/2010	4:20:43 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	4:20:43 PM	Tube furnace set to 0
9/9/2010	4:21:43 PM	Helium valve closed
9/9/2010	4:21:43 PM	H2 valve closed
9/9/2010	4:21:43 PM	BCl3 valve closed
9/9/2010	4:21:43 PM	PH3 valve closed
9/9/2010	4:21:43 PM	SiCl4 pre valve closed
9/9/2010	4:21:43 PM	SiCl4 post valve closed
9/9/2010	4:21:43 PM	Bubbler valve closed
9/9/2010	4:21:43 PM	Main Vac valve opened
9/9/2010	4:21:43 PM	Bypass valve opened
9/9/2010	4:21:43 PM	Helium MFC set to  0.000000
9/9/2010	4:21:43 PM	H2 MFC set to  0.000000
9/9/2010	4:21:43 PM	BCl3 MFC set to  0.000000
9/9/2010	4:21:43 PM	PHl3 MFC set to  0.000000
9/9/2010	4:21:43 PM	SiCl4 MFC set to  0.000000
9/9/2010	4:21:43 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	4:21:43 PM	Tube furnace set to 0
9/9/2010	4:22:43 PM	H2 valve closed
9/9/2010	4:22:43 PM	BCl3 valve closed
9/9/2010	4:22:43 PM	PH3 valve closed
9/9/2010	4:22:43 PM	SiCl4 pre valve closed
9/9/2010	4:22:43 PM	SiCl4 post valve closed
9/9/2010	4:22:43 PM	Bubbler valve closed
9/9/2010	4:22:43 PM	Helium valve opened
9/9/2010	4:22:43 PM	Main Vac valve opened
9/9/2010	4:22:43 PM	Bypass valve opened
9/9/2010	4:22:43 PM	Helium MFC set to  100.000000
9/9/2010	4:22:43 PM	H2 MFC set to  0.000000
9/9/2010	4:22:43 PM	BCl3 MFC set to  0.000000
9/9/2010	4:22:43 PM	PHl3 MFC set to  0.000000
9/9/2010	4:22:43 PM	SiCl4 MFC set to  0.000000
9/9/2010	4:22:43 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	4:22:44 PM	Tube furnace set to 0
9/9/2010	4:23:44 PM	Helium valve closed
9/9/2010	4:23:44 PM	H2 valve closed
9/9/2010	4:23:44 PM	BCl3 valve closed
9/9/2010	4:23:44 PM	PH3 valve closed
9/9/2010	4:23:44 PM	SiCl4 pre valve closed
9/9/2010	4:23:44 PM	SiCl4 post valve closed
9/9/2010	4:23:44 PM	Bubbler valve closed
9/9/2010	4:23:44 PM	Main Vac valve opened
9/9/2010	4:23:44 PM	Bypass valve opened
9/9/2010	4:23:44 PM	Helium MFC set to  0.000000
9/9/2010	4:23:44 PM	H2 MFC set to  0.000000
9/9/2010	4:23:44 PM	BCl3 MFC set to  0.000000
9/9/2010	4:23:44 PM	PHl3 MFC set to  0.000000
9/9/2010	4:23:44 PM	SiCl4 MFC set to  0.000000
9/9/2010	4:23:44 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	4:23:44 PM	Tube furnace set to 0
9/9/2010	4:24:44 PM	H2 valve closed
9/9/2010	4:24:44 PM	BCl3 valve closed
9/9/2010	4:24:44 PM	PH3 valve closed
9/9/2010	4:24:44 PM	SiCl4 pre valve closed
9/9/2010	4:24:44 PM	SiCl4 post valve closed
9/9/2010	4:24:44 PM	Bubbler valve closed
9/9/2010	4:24:44 PM	Helium valve opened
9/9/2010	4:24:44 PM	Main Vac valve opened
9/9/2010	4:24:44 PM	Bypass valve opened
9/9/2010	4:24:44 PM	Helium MFC set to  100.000000
9/9/2010	4:24:44 PM	H2 MFC set to  0.000000
9/9/2010	4:24:44 PM	BCl3 MFC set to  0.000000
9/9/2010	4:24:44 PM	PHl3 MFC set to  0.000000
9/9/2010	4:24:44 PM	SiCl4 MFC set to  0.000000
9/9/2010	4:24:44 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	4:24:44 PM	Tube furnace set to 0
9/9/2010	4:25:44 PM	Helium valve closed
9/9/2010	4:25:44 PM	H2 valve closed
9/9/2010	4:25:44 PM	BCl3 valve closed
9/9/2010	4:25:44 PM	PH3 valve closed
9/9/2010	4:25:44 PM	SiCl4 pre valve closed
9/9/2010	4:25:44 PM	SiCl4 post valve closed
9/9/2010	4:25:44 PM	Bubbler valve closed
9/9/2010	4:25:44 PM	Main Vac valve opened
9/9/2010	4:25:44 PM	Bypass valve opened
9/9/2010	4:25:44 PM	Helium MFC set to  0.000000
9/9/2010	4:25:44 PM	H2 MFC set to  0.000000
9/9/2010	4:25:44 PM	BCl3 MFC set to  0.000000
9/9/2010	4:25:44 PM	PHl3 MFC set to  0.000000
9/9/2010	4:25:44 PM	SiCl4 MFC set to  0.000000
9/9/2010	4:25:44 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	4:25:44 PM	Tube furnace set to 0
9/9/2010	4:26:44 PM	H2 valve closed
9/9/2010	4:26:44 PM	BCl3 valve closed
9/9/2010	4:26:44 PM	PH3 valve closed
9/9/2010	4:26:44 PM	SiCl4 pre valve closed
9/9/2010	4:26:44 PM	SiCl4 post valve closed
9/9/2010	4:26:44 PM	Bubbler valve closed
9/9/2010	4:26:44 PM	Helium valve opened
9/9/2010	4:26:44 PM	Main Vac valve opened
9/9/2010	4:26:44 PM	Bypass valve opened
9/9/2010	4:26:44 PM	Helium MFC set to  100.000000
9/9/2010	4:26:44 PM	H2 MFC set to  0.000000
9/9/2010	4:26:44 PM	BCl3 MFC set to  0.000000
9/9/2010	4:26:44 PM	PHl3 MFC set to  0.000000
9/9/2010	4:26:44 PM	SiCl4 MFC set to  0.000000
9/9/2010	4:26:44 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	4:26:44 PM	Tube furnace set to 0
9/9/2010	4:27:44 PM	Helium valve closed
9/9/2010	4:27:44 PM	H2 valve closed
9/9/2010	4:27:44 PM	BCl3 valve closed
9/9/2010	4:27:44 PM	PH3 valve closed
9/9/2010	4:27:44 PM	SiCl4 pre valve closed
9/9/2010	4:27:44 PM	SiCl4 post valve closed
9/9/2010	4:27:44 PM	Bubbler valve closed
9/9/2010	4:27:44 PM	Main Vac valve opened
9/9/2010	4:27:44 PM	Bypass valve opened
9/9/2010	4:27:44 PM	Helium MFC set to  0.000000
9/9/2010	4:27:44 PM	H2 MFC set to  0.000000
9/9/2010	4:27:44 PM	BCl3 MFC set to  0.000000
9/9/2010	4:27:44 PM	PHl3 MFC set to  0.000000
9/9/2010	4:27:44 PM	SiCl4 MFC set to  0.000000
9/9/2010	4:27:44 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	4:27:45 PM	Tube furnace set to 0
9/9/2010	4:28:45 PM	H2 valve closed
9/9/2010	4:28:45 PM	BCl3 valve closed
9/9/2010	4:28:45 PM	PH3 valve closed
9/9/2010	4:28:45 PM	SiCl4 pre valve closed
9/9/2010	4:28:45 PM	SiCl4 post valve closed
9/9/2010	4:28:45 PM	Bubbler valve closed
9/9/2010	4:28:45 PM	Helium valve opened
9/9/2010	4:28:45 PM	Main Vac valve opened
9/9/2010	4:28:45 PM	Bypass valve opened
9/9/2010	4:28:45 PM	Helium MFC set to  100.000000
9/9/2010	4:28:45 PM	H2 MFC set to  0.000000
9/9/2010	4:28:45 PM	BCl3 MFC set to  0.000000
9/9/2010	4:28:45 PM	PHl3 MFC set to  0.000000
9/9/2010	4:28:45 PM	SiCl4 MFC set to  0.000000
9/9/2010	4:28:45 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	4:28:45 PM	Tube furnace set to 0
9/9/2010	4:29:45 PM	Helium valve closed
9/9/2010	4:29:45 PM	H2 valve closed
9/9/2010	4:29:45 PM	BCl3 valve closed
9/9/2010	4:29:45 PM	PH3 valve closed
9/9/2010	4:29:45 PM	SiCl4 pre valve closed
9/9/2010	4:29:45 PM	SiCl4 post valve closed
9/9/2010	4:29:45 PM	Bubbler valve closed
9/9/2010	4:29:45 PM	Main Vac valve opened
9/9/2010	4:29:45 PM	Bypass valve opened
9/9/2010	4:29:45 PM	Helium MFC set to  0.000000
9/9/2010	4:29:45 PM	H2 MFC set to  0.000000
9/9/2010	4:29:45 PM	BCl3 MFC set to  0.000000
9/9/2010	4:29:45 PM	PHl3 MFC set to  0.000000
9/9/2010	4:29:45 PM	SiCl4 MFC set to  0.000000
9/9/2010	4:29:45 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	4:29:45 PM	Tube furnace set to 0
9/9/2010	4:30:45 PM	H2 valve closed
9/9/2010	4:30:45 PM	BCl3 valve closed
9/9/2010	4:30:45 PM	PH3 valve closed
9/9/2010	4:30:45 PM	SiCl4 pre valve closed
9/9/2010	4:30:45 PM	SiCl4 post valve closed
9/9/2010	4:30:45 PM	Bubbler valve closed
9/9/2010	4:30:45 PM	Helium valve opened
9/9/2010	4:30:45 PM	Main Vac valve opened
9/9/2010	4:30:45 PM	Bypass valve opened
9/9/2010	4:30:45 PM	Helium MFC set to  100.000000
9/9/2010	4:30:45 PM	H2 MFC set to  0.000000
9/9/2010	4:30:45 PM	BCl3 MFC set to  0.000000
9/9/2010	4:30:45 PM	PHl3 MFC set to  0.000000
9/9/2010	4:30:45 PM	SiCl4 MFC set to  0.000000
9/9/2010	4:30:45 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	4:30:45 PM	Tube furnace set to 0
9/9/2010	4:31:45 PM	Helium valve closed
9/9/2010	4:31:45 PM	H2 valve closed
9/9/2010	4:31:45 PM	BCl3 valve closed
9/9/2010	4:31:45 PM	PH3 valve closed
9/9/2010	4:31:45 PM	SiCl4 pre valve closed
9/9/2010	4:31:45 PM	SiCl4 post valve closed
9/9/2010	4:31:45 PM	Bubbler valve closed
9/9/2010	4:31:45 PM	Main Vac valve opened
9/9/2010	4:31:45 PM	Bypass valve opened
9/9/2010	4:31:45 PM	Helium MFC set to  0.000000
9/9/2010	4:31:45 PM	H2 MFC set to  0.000000
9/9/2010	4:31:45 PM	BCl3 MFC set to  0.000000
9/9/2010	4:31:45 PM	PHl3 MFC set to  0.000000
9/9/2010	4:31:45 PM	SiCl4 MFC set to  0.000000
9/9/2010	4:31:45 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	4:31:45 PM	Tube furnace set to 0
9/9/2010	4:32:45 PM	H2 valve closed
9/9/2010	4:32:45 PM	BCl3 valve closed
9/9/2010	4:32:45 PM	PH3 valve closed
9/9/2010	4:32:45 PM	SiCl4 pre valve closed
9/9/2010	4:32:45 PM	SiCl4 post valve closed
9/9/2010	4:32:45 PM	Bubbler valve closed
9/9/2010	4:32:45 PM	Helium valve opened
9/9/2010	4:32:45 PM	Main Vac valve opened
9/9/2010	4:32:45 PM	Bypass valve opened
9/9/2010	4:32:45 PM	Helium MFC set to  100.000000
9/9/2010	4:32:45 PM	H2 MFC set to  0.000000
9/9/2010	4:32:45 PM	BCl3 MFC set to  0.000000
9/9/2010	4:32:45 PM	PHl3 MFC set to  0.000000
9/9/2010	4:32:45 PM	SiCl4 MFC set to  0.000000
9/9/2010	4:32:45 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	4:32:46 PM	Tube furnace set to 0
9/9/2010	4:33:46 PM	Helium valve closed
9/9/2010	4:33:46 PM	H2 valve closed
9/9/2010	4:33:46 PM	BCl3 valve closed
9/9/2010	4:33:46 PM	PH3 valve closed
9/9/2010	4:33:46 PM	SiCl4 pre valve closed
9/9/2010	4:33:46 PM	SiCl4 post valve closed
9/9/2010	4:33:46 PM	Bubbler valve closed
9/9/2010	4:33:46 PM	Main Vac valve opened
9/9/2010	4:33:46 PM	Bypass valve opened
9/9/2010	4:33:46 PM	Helium MFC set to  0.000000
9/9/2010	4:33:46 PM	H2 MFC set to  0.000000
9/9/2010	4:33:46 PM	BCl3 MFC set to  0.000000
9/9/2010	4:33:46 PM	PHl3 MFC set to  0.000000
9/9/2010	4:33:46 PM	SiCl4 MFC set to  0.000000
9/9/2010	4:33:46 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	4:33:46 PM	Tube furnace set to 0
9/9/2010	4:33:47 PM	Run finished at 4:33 PM
9/9/2010	4:33:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/9/2010	6:05:04 PM	Helium valve opened
9/9/2010	6:05:09 PM	Helium MFC set to  100.000000
9/9/2010	6:20:53 PM	Helium MFC set to  0.000000
9/9/2010	6:20:54 PM	Helium valve closed
9/9/2010	6:23:04 PM	Bypass valve closed
9/9/2010	6:23:04 PM	Main Vac valve closed
9/9/2010	6:23:39 PM	Bypass valve opened
9/9/2010	6:23:40 PM	Main Vac valve opened
9/9/2010	6:24:16 PM	Recipe started at 6:24 PM
9/9/2010	6:24:16 PM	Helium valve closed
9/9/2010	6:24:16 PM	BCl3 valve closed
9/9/2010	6:24:16 PM	PH3 valve closed
9/9/2010	6:24:16 PM	SiCl4 pre valve closed
9/9/2010	6:24:16 PM	SiCl4 post valve closed
9/9/2010	6:24:16 PM	Main Vac valve closed
9/9/2010	6:24:16 PM	Bypass valve closed
9/9/2010	6:24:16 PM	Bubbler valve closed
9/9/2010	6:24:16 PM	H2 valve opened
9/9/2010	6:24:16 PM	Helium MFC set to  0.000000
9/9/2010	6:24:16 PM	H2 MFC set to  500.000000
9/9/2010	6:24:16 PM	BCl3 MFC set to  0.000000
9/9/2010	6:24:16 PM	PHl3 MFC set to  0.000000
9/9/2010	6:24:16 PM	SiCl4 MFC set to  0.000000
9/9/2010	6:24:16 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	6:24:16 PM	Tube furnace set to 0
9/9/2010	6:25:37 PM	Helium valve closed
9/9/2010	6:25:37 PM	BCl3 valve closed
9/9/2010	6:25:37 PM	PH3 valve closed
9/9/2010	6:25:37 PM	SiCl4 pre valve closed
9/9/2010	6:25:37 PM	SiCl4 post valve closed
9/9/2010	6:25:37 PM	Main Vac valve closed
9/9/2010	6:25:37 PM	Bypass valve closed
9/9/2010	6:25:37 PM	H2 valve opened
9/9/2010	6:25:37 PM	Bubbler valve opened
9/9/2010	6:25:37 PM	Helium MFC set to  0.000000
9/9/2010	6:25:37 PM	H2 MFC set to  500.000000
9/9/2010	6:25:37 PM	BCl3 MFC set to  0.000000
9/9/2010	6:25:37 PM	PHl3 MFC set to  0.000000
9/9/2010	6:25:37 PM	SiCl4 MFC set to  0.000000
9/9/2010	6:25:37 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	6:25:37 PM	Tube furnace set to 1000
9/9/2010	6:45:38 PM	Helium valve closed
9/9/2010	6:45:38 PM	BCl3 valve closed
9/9/2010	6:45:38 PM	Main Vac valve closed
9/9/2010	6:45:38 PM	Bypass valve closed
9/9/2010	6:45:38 PM	H2 valve opened
9/9/2010	6:45:38 PM	PH3 valve opened
9/9/2010	6:45:38 PM	SiCl4 pre valve opened
9/9/2010	6:45:38 PM	SiCl4 post valve opened
9/9/2010	6:45:38 PM	Bubbler valve opened
9/9/2010	6:45:38 PM	Helium MFC set to  0.000000
9/9/2010	6:45:38 PM	H2 MFC set to  500.000000
9/9/2010	6:45:38 PM	BCl3 MFC set to  0.000000
9/9/2010	6:45:38 PM	PHl3 MFC set to  1.000000
9/9/2010	6:45:38 PM	SiCl4 MFC set to  50.000000
9/9/2010	6:45:38 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	6:45:38 PM	Tube furnace set to 1000
9/9/2010	7:10:38 PM	H2 valve closed
9/9/2010	7:10:38 PM	BCl3 valve closed
9/9/2010	7:10:38 PM	PH3 valve closed
9/9/2010	7:10:38 PM	SiCl4 pre valve closed
9/9/2010	7:10:38 PM	SiCl4 post valve closed
9/9/2010	7:10:38 PM	Main Vac valve closed
9/9/2010	7:10:38 PM	Bypass valve closed
9/9/2010	7:10:38 PM	Helium valve opened
9/9/2010	7:10:38 PM	Bubbler valve opened
9/9/2010	7:10:38 PM	Helium MFC set to  500.000000
9/9/2010	7:10:38 PM	H2 MFC set to  0.000000
9/9/2010	7:10:38 PM	BCl3 MFC set to  0.000000
9/9/2010	7:10:38 PM	PHl3 MFC set to  0.000000
9/9/2010	7:10:38 PM	SiCl4 MFC set to  0.000000
9/9/2010	7:10:38 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	7:10:38 PM	Tube furnace set to 0
9/9/2010	7:30:38 PM	Helium valve closed
9/9/2010	7:30:38 PM	H2 valve closed
9/9/2010	7:30:38 PM	BCl3 valve closed
9/9/2010	7:30:38 PM	PH3 valve closed
9/9/2010	7:30:38 PM	SiCl4 pre valve closed
9/9/2010	7:30:38 PM	SiCl4 post valve closed
9/9/2010	7:30:38 PM	Main Vac valve closed
9/9/2010	7:30:38 PM	Bypass valve closed
9/9/2010	7:30:38 PM	Bubbler valve closed
9/9/2010	7:30:38 PM	Helium MFC set to  0.000000
9/9/2010	7:30:38 PM	H2 MFC set to  0.000000
9/9/2010	7:30:38 PM	BCl3 MFC set to  0.000000
9/9/2010	7:30:38 PM	PHl3 MFC set to  0.000000
9/9/2010	7:30:38 PM	SiCl4 MFC set to  0.000000
9/9/2010	7:30:38 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	7:30:38 PM	Tube furnace set to 0
9/9/2010	7:30:39 PM	Run finished at 7:30 PM
9/9/2010	7:36:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/9/2010	7:36:54 PM	Recipe started at 7:36 PM
9/9/2010	7:36:54 PM	Helium valve closed
9/9/2010	7:36:54 PM	H2 valve closed
9/9/2010	7:36:54 PM	BCl3 valve closed
9/9/2010	7:36:54 PM	PH3 valve closed
9/9/2010	7:36:54 PM	SiCl4 pre valve closed
9/9/2010	7:36:54 PM	SiCl4 post valve closed
9/9/2010	7:36:54 PM	Main Vac valve closed
9/9/2010	7:36:54 PM	Bubbler valve closed
9/9/2010	7:36:54 PM	Bypass valve opened
9/9/2010	7:36:54 PM	Helium MFC set to  0.000000
9/9/2010	7:36:54 PM	H2 MFC set to  0.000000
9/9/2010	7:36:54 PM	BCl3 MFC set to  0.000000
9/9/2010	7:36:54 PM	PHl3 MFC set to  0.000000
9/9/2010	7:36:54 PM	SiCl4 MFC set to  0.000000
9/9/2010	7:36:54 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	7:36:54 PM	Tube furnace set to 0
9/9/2010	7:37:34 PM	Helium valve closed
9/9/2010	7:37:34 PM	H2 valve closed
9/9/2010	7:37:34 PM	BCl3 valve closed
9/9/2010	7:37:34 PM	PH3 valve closed
9/9/2010	7:37:34 PM	SiCl4 pre valve closed
9/9/2010	7:37:34 PM	SiCl4 post valve closed
9/9/2010	7:37:34 PM	Bubbler valve closed
9/9/2010	7:37:34 PM	Main Vac valve opened
9/9/2010	7:37:34 PM	Bypass valve opened
9/9/2010	7:37:34 PM	Helium MFC set to  0.000000
9/9/2010	7:37:34 PM	H2 MFC set to  0.000000
9/9/2010	7:37:34 PM	BCl3 MFC set to  0.000000
9/9/2010	7:37:34 PM	PHl3 MFC set to  0.000000
9/9/2010	7:37:34 PM	SiCl4 MFC set to  0.000000
9/9/2010	7:37:34 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	7:37:34 PM	Tube furnace set to 0
9/9/2010	7:37:35 PM	Run finished at 7:37 PM
9/9/2010	7:37:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/9/2010	7:42:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/9/2010	7:42:29 PM	Recipe started at 7:42 PM
9/9/2010	7:42:29 PM	H2 valve closed
9/9/2010	7:42:29 PM	BCl3 valve closed
9/9/2010	7:42:29 PM	PH3 valve closed
9/9/2010	7:42:29 PM	SiCl4 pre valve closed
9/9/2010	7:42:29 PM	SiCl4 post valve closed
9/9/2010	7:42:29 PM	Main Vac valve closed
9/9/2010	7:42:29 PM	Bypass valve closed
9/9/2010	7:42:29 PM	Bubbler valve closed
9/9/2010	7:42:29 PM	Helium valve opened
9/9/2010	7:42:29 PM	Helium MFC set to  500.000000
9/9/2010	7:42:29 PM	H2 MFC set to  0.000000
9/9/2010	7:42:29 PM	BCl3 MFC set to  0.000000
9/9/2010	7:42:29 PM	PHl3 MFC set to  0.000000
9/9/2010	7:42:29 PM	SiCl4 MFC set to  0.000000
9/9/2010	7:42:29 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	7:42:29 PM	Tube furnace set to 0
9/9/2010	7:43:47 PM	Helium valve closed
9/9/2010	7:43:47 PM	H2 valve closed
9/9/2010	7:43:47 PM	BCl3 valve closed
9/9/2010	7:43:47 PM	PH3 valve closed
9/9/2010	7:43:47 PM	SiCl4 pre valve closed
9/9/2010	7:43:47 PM	SiCl4 post valve closed
9/9/2010	7:43:47 PM	Main Vac valve closed
9/9/2010	7:43:47 PM	Bypass valve closed
9/9/2010	7:43:47 PM	Bubbler valve closed
9/9/2010	7:43:47 PM	Helium MFC set to  0.000000
9/9/2010	7:43:47 PM	H2 MFC set to  0.000000
9/9/2010	7:43:47 PM	BCl3 MFC set to  0.000000
9/9/2010	7:43:47 PM	PHl3 MFC set to  0.000000
9/9/2010	7:43:47 PM	SiCl4 MFC set to  0.000000
9/9/2010	7:43:47 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	7:43:48 PM	Tube furnace set to 0
9/9/2010	7:43:48 PM	Run finished at 7:43 PM
9/9/2010	7:43:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/9/2010	7:46:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/9/2010	7:46:28 PM	Recipe started at 7:46 PM
9/9/2010	7:46:28 PM	Helium valve closed
9/9/2010	7:46:28 PM	H2 valve closed
9/9/2010	7:46:28 PM	BCl3 valve closed
9/9/2010	7:46:28 PM	PH3 valve closed
9/9/2010	7:46:28 PM	SiCl4 pre valve closed
9/9/2010	7:46:28 PM	SiCl4 post valve closed
9/9/2010	7:46:28 PM	Main Vac valve closed
9/9/2010	7:46:28 PM	Bubbler valve closed
9/9/2010	7:46:28 PM	Bypass valve opened
9/9/2010	7:46:28 PM	Helium MFC set to  0.000000
9/9/2010	7:46:28 PM	H2 MFC set to  0.000000
9/9/2010	7:46:28 PM	BCl3 MFC set to  0.000000
9/9/2010	7:46:28 PM	PHl3 MFC set to  0.000000
9/9/2010	7:46:28 PM	SiCl4 MFC set to  0.000000
9/9/2010	7:46:28 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	7:46:28 PM	Tube furnace set to 0
9/9/2010	7:47:07 PM	Helium valve closed
9/9/2010	7:47:07 PM	H2 valve closed
9/9/2010	7:47:07 PM	BCl3 valve closed
9/9/2010	7:47:07 PM	PH3 valve closed
9/9/2010	7:47:07 PM	SiCl4 pre valve closed
9/9/2010	7:47:07 PM	SiCl4 post valve closed
9/9/2010	7:47:07 PM	Bubbler valve closed
9/9/2010	7:47:07 PM	Main Vac valve opened
9/9/2010	7:47:07 PM	Bypass valve opened
9/9/2010	7:47:07 PM	Helium MFC set to  0.000000
9/9/2010	7:47:07 PM	H2 MFC set to  0.000000
9/9/2010	7:47:07 PM	BCl3 MFC set to  0.000000
9/9/2010	7:47:07 PM	PHl3 MFC set to  0.000000
9/9/2010	7:47:07 PM	SiCl4 MFC set to  0.000000
9/9/2010	7:47:07 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	7:47:08 PM	Tube furnace set to 0
9/9/2010	7:47:08 PM	Run finished at 7:47 PM
9/9/2010	7:47:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/9/2010	7:49:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/9/2010	7:49:30 PM	Recipe started at 7:49 PM
9/9/2010	7:49:30 PM	Helium valve closed
9/9/2010	7:49:30 PM	H2 valve closed
9/9/2010	7:49:30 PM	BCl3 valve closed
9/9/2010	7:49:30 PM	PH3 valve closed
9/9/2010	7:49:30 PM	SiCl4 pre valve closed
9/9/2010	7:49:30 PM	SiCl4 post valve closed
9/9/2010	7:49:30 PM	Main Vac valve closed
9/9/2010	7:49:30 PM	Bubbler valve closed
9/9/2010	7:49:30 PM	Bypass valve opened
9/9/2010	7:49:30 PM	Helium MFC set to  0.000000
9/9/2010	7:49:30 PM	H2 MFC set to  0.000000
9/9/2010	7:49:30 PM	BCl3 MFC set to  0.000000
9/9/2010	7:49:30 PM	PHl3 MFC set to  0.000000
9/9/2010	7:49:30 PM	SiCl4 MFC set to  0.000000
9/9/2010	7:49:30 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	7:49:31 PM	Tube furnace set to 0
9/9/2010	7:49:31 PM	Helium valve closed
9/9/2010	7:49:31 PM	H2 valve closed
9/9/2010	7:49:31 PM	BCl3 valve closed
9/9/2010	7:49:31 PM	PH3 valve closed
9/9/2010	7:49:31 PM	SiCl4 pre valve closed
9/9/2010	7:49:31 PM	SiCl4 post valve closed
9/9/2010	7:49:31 PM	Bubbler valve closed
9/9/2010	7:49:31 PM	Main Vac valve opened
9/9/2010	7:49:31 PM	Bypass valve opened
9/9/2010	7:49:31 PM	Helium MFC set to  0.000000
9/9/2010	7:49:31 PM	H2 MFC set to  0.000000
9/9/2010	7:49:31 PM	BCl3 MFC set to  0.000000
9/9/2010	7:49:31 PM	PHl3 MFC set to  0.000000
9/9/2010	7:49:31 PM	SiCl4 MFC set to  0.000000
9/9/2010	7:49:31 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	7:49:31 PM	Tube furnace set to 0
9/9/2010	7:50:31 PM	H2 valve closed
9/9/2010	7:50:31 PM	BCl3 valve closed
9/9/2010	7:50:31 PM	PH3 valve closed
9/9/2010	7:50:31 PM	SiCl4 pre valve closed
9/9/2010	7:50:31 PM	SiCl4 post valve closed
9/9/2010	7:50:31 PM	Bubbler valve closed
9/9/2010	7:50:31 PM	Helium valve opened
9/9/2010	7:50:31 PM	Main Vac valve opened
9/9/2010	7:50:31 PM	Bypass valve opened
9/9/2010	7:50:31 PM	Helium MFC set to  100.000000
9/9/2010	7:50:31 PM	H2 MFC set to  0.000000
9/9/2010	7:50:31 PM	BCl3 MFC set to  0.000000
9/9/2010	7:50:31 PM	PHl3 MFC set to  0.000000
9/9/2010	7:50:31 PM	SiCl4 MFC set to  0.000000
9/9/2010	7:50:31 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	7:50:31 PM	Tube furnace set to 0
9/9/2010	7:51:31 PM	Helium valve closed
9/9/2010	7:51:31 PM	H2 valve closed
9/9/2010	7:51:31 PM	BCl3 valve closed
9/9/2010	7:51:31 PM	PH3 valve closed
9/9/2010	7:51:31 PM	SiCl4 pre valve closed
9/9/2010	7:51:31 PM	SiCl4 post valve closed
9/9/2010	7:51:31 PM	Bubbler valve closed
9/9/2010	7:51:31 PM	Main Vac valve opened
9/9/2010	7:51:31 PM	Bypass valve opened
9/9/2010	7:51:31 PM	Helium MFC set to  0.000000
9/9/2010	7:51:31 PM	H2 MFC set to  0.000000
9/9/2010	7:51:31 PM	BCl3 MFC set to  0.000000
9/9/2010	7:51:31 PM	PHl3 MFC set to  0.000000
9/9/2010	7:51:31 PM	SiCl4 MFC set to  0.000000
9/9/2010	7:51:31 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	7:51:31 PM	Tube furnace set to 0
9/9/2010	7:52:32 PM	H2 valve closed
9/9/2010	7:52:32 PM	BCl3 valve closed
9/9/2010	7:52:32 PM	PH3 valve closed
9/9/2010	7:52:32 PM	SiCl4 pre valve closed
9/9/2010	7:52:32 PM	SiCl4 post valve closed
9/9/2010	7:52:32 PM	Bubbler valve closed
9/9/2010	7:52:32 PM	Helium valve opened
9/9/2010	7:52:32 PM	Main Vac valve opened
9/9/2010	7:52:32 PM	Bypass valve opened
9/9/2010	7:52:32 PM	Helium MFC set to  100.000000
9/9/2010	7:52:32 PM	H2 MFC set to  0.000000
9/9/2010	7:52:32 PM	BCl3 MFC set to  0.000000
9/9/2010	7:52:32 PM	PHl3 MFC set to  0.000000
9/9/2010	7:52:32 PM	SiCl4 MFC set to  0.000000
9/9/2010	7:52:32 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	7:52:32 PM	Tube furnace set to 0
9/9/2010	7:53:32 PM	Helium valve closed
9/9/2010	7:53:32 PM	H2 valve closed
9/9/2010	7:53:32 PM	BCl3 valve closed
9/9/2010	7:53:32 PM	PH3 valve closed
9/9/2010	7:53:32 PM	SiCl4 pre valve closed
9/9/2010	7:53:32 PM	SiCl4 post valve closed
9/9/2010	7:53:32 PM	Bubbler valve closed
9/9/2010	7:53:32 PM	Main Vac valve opened
9/9/2010	7:53:32 PM	Bypass valve opened
9/9/2010	7:53:32 PM	Helium MFC set to  0.000000
9/9/2010	7:53:32 PM	H2 MFC set to  0.000000
9/9/2010	7:53:32 PM	BCl3 MFC set to  0.000000
9/9/2010	7:53:32 PM	PHl3 MFC set to  0.000000
9/9/2010	7:53:32 PM	SiCl4 MFC set to  0.000000
9/9/2010	7:53:32 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	7:53:32 PM	Tube furnace set to 0
9/9/2010	7:54:32 PM	H2 valve closed
9/9/2010	7:54:32 PM	BCl3 valve closed
9/9/2010	7:54:32 PM	PH3 valve closed
9/9/2010	7:54:32 PM	SiCl4 pre valve closed
9/9/2010	7:54:32 PM	SiCl4 post valve closed
9/9/2010	7:54:32 PM	Bubbler valve closed
9/9/2010	7:54:32 PM	Helium valve opened
9/9/2010	7:54:32 PM	Main Vac valve opened
9/9/2010	7:54:32 PM	Bypass valve opened
9/9/2010	7:54:32 PM	Helium MFC set to  100.000000
9/9/2010	7:54:32 PM	H2 MFC set to  0.000000
9/9/2010	7:54:32 PM	BCl3 MFC set to  0.000000
9/9/2010	7:54:32 PM	PHl3 MFC set to  0.000000
9/9/2010	7:54:32 PM	SiCl4 MFC set to  0.000000
9/9/2010	7:54:32 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	7:54:32 PM	Tube furnace set to 0
9/9/2010	7:55:32 PM	Helium valve closed
9/9/2010	7:55:32 PM	H2 valve closed
9/9/2010	7:55:32 PM	BCl3 valve closed
9/9/2010	7:55:32 PM	PH3 valve closed
9/9/2010	7:55:32 PM	SiCl4 pre valve closed
9/9/2010	7:55:32 PM	SiCl4 post valve closed
9/9/2010	7:55:32 PM	Bubbler valve closed
9/9/2010	7:55:32 PM	Main Vac valve opened
9/9/2010	7:55:32 PM	Bypass valve opened
9/9/2010	7:55:32 PM	Helium MFC set to  0.000000
9/9/2010	7:55:32 PM	H2 MFC set to  0.000000
9/9/2010	7:55:32 PM	BCl3 MFC set to  0.000000
9/9/2010	7:55:32 PM	PHl3 MFC set to  0.000000
9/9/2010	7:55:32 PM	SiCl4 MFC set to  0.000000
9/9/2010	7:55:32 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	7:55:32 PM	Tube furnace set to 0
9/9/2010	7:56:32 PM	H2 valve closed
9/9/2010	7:56:32 PM	BCl3 valve closed
9/9/2010	7:56:32 PM	PH3 valve closed
9/9/2010	7:56:32 PM	SiCl4 pre valve closed
9/9/2010	7:56:32 PM	SiCl4 post valve closed
9/9/2010	7:56:32 PM	Bubbler valve closed
9/9/2010	7:56:32 PM	Helium valve opened
9/9/2010	7:56:32 PM	Main Vac valve opened
9/9/2010	7:56:32 PM	Bypass valve opened
9/9/2010	7:56:32 PM	Helium MFC set to  100.000000
9/9/2010	7:56:32 PM	H2 MFC set to  0.000000
9/9/2010	7:56:32 PM	BCl3 MFC set to  0.000000
9/9/2010	7:56:32 PM	PHl3 MFC set to  0.000000
9/9/2010	7:56:32 PM	SiCl4 MFC set to  0.000000
9/9/2010	7:56:32 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	7:56:32 PM	Tube furnace set to 0
9/9/2010	7:57:33 PM	Helium valve closed
9/9/2010	7:57:33 PM	H2 valve closed
9/9/2010	7:57:33 PM	BCl3 valve closed
9/9/2010	7:57:33 PM	PH3 valve closed
9/9/2010	7:57:33 PM	SiCl4 pre valve closed
9/9/2010	7:57:33 PM	SiCl4 post valve closed
9/9/2010	7:57:33 PM	Bubbler valve closed
9/9/2010	7:57:33 PM	Main Vac valve opened
9/9/2010	7:57:33 PM	Bypass valve opened
9/9/2010	7:57:33 PM	Helium MFC set to  0.000000
9/9/2010	7:57:33 PM	H2 MFC set to  0.000000
9/9/2010	7:57:33 PM	BCl3 MFC set to  0.000000
9/9/2010	7:57:33 PM	PHl3 MFC set to  0.000000
9/9/2010	7:57:33 PM	SiCl4 MFC set to  0.000000
9/9/2010	7:57:33 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	7:57:33 PM	Tube furnace set to 0
9/9/2010	7:58:33 PM	H2 valve closed
9/9/2010	7:58:33 PM	BCl3 valve closed
9/9/2010	7:58:33 PM	PH3 valve closed
9/9/2010	7:58:33 PM	SiCl4 pre valve closed
9/9/2010	7:58:33 PM	SiCl4 post valve closed
9/9/2010	7:58:33 PM	Bubbler valve closed
9/9/2010	7:58:33 PM	Helium valve opened
9/9/2010	7:58:33 PM	Main Vac valve opened
9/9/2010	7:58:33 PM	Bypass valve opened
9/9/2010	7:58:33 PM	Helium MFC set to  100.000000
9/9/2010	7:58:33 PM	H2 MFC set to  0.000000
9/9/2010	7:58:33 PM	BCl3 MFC set to  0.000000
9/9/2010	7:58:33 PM	PHl3 MFC set to  0.000000
9/9/2010	7:58:33 PM	SiCl4 MFC set to  0.000000
9/9/2010	7:58:33 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	7:58:33 PM	Tube furnace set to 0
9/9/2010	7:59:33 PM	Helium valve closed
9/9/2010	7:59:33 PM	H2 valve closed
9/9/2010	7:59:33 PM	BCl3 valve closed
9/9/2010	7:59:33 PM	PH3 valve closed
9/9/2010	7:59:33 PM	SiCl4 pre valve closed
9/9/2010	7:59:33 PM	SiCl4 post valve closed
9/9/2010	7:59:33 PM	Bubbler valve closed
9/9/2010	7:59:33 PM	Main Vac valve opened
9/9/2010	7:59:33 PM	Bypass valve opened
9/9/2010	7:59:33 PM	Helium MFC set to  0.000000
9/9/2010	7:59:33 PM	H2 MFC set to  0.000000
9/9/2010	7:59:33 PM	BCl3 MFC set to  0.000000
9/9/2010	7:59:33 PM	PHl3 MFC set to  0.000000
9/9/2010	7:59:33 PM	SiCl4 MFC set to  0.000000
9/9/2010	7:59:33 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	7:59:33 PM	Tube furnace set to 0
9/9/2010	8:00:33 PM	H2 valve closed
9/9/2010	8:00:33 PM	BCl3 valve closed
9/9/2010	8:00:33 PM	PH3 valve closed
9/9/2010	8:00:33 PM	SiCl4 pre valve closed
9/9/2010	8:00:33 PM	SiCl4 post valve closed
9/9/2010	8:00:33 PM	Bubbler valve closed
9/9/2010	8:00:33 PM	Helium valve opened
9/9/2010	8:00:33 PM	Main Vac valve opened
9/9/2010	8:00:33 PM	Bypass valve opened
9/9/2010	8:00:33 PM	Helium MFC set to  100.000000
9/9/2010	8:00:33 PM	H2 MFC set to  0.000000
9/9/2010	8:00:33 PM	BCl3 MFC set to  0.000000
9/9/2010	8:00:33 PM	PHl3 MFC set to  0.000000
9/9/2010	8:00:33 PM	SiCl4 MFC set to  0.000000
9/9/2010	8:00:33 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	8:00:33 PM	Tube furnace set to 0
9/9/2010	8:01:33 PM	Helium valve closed
9/9/2010	8:01:33 PM	H2 valve closed
9/9/2010	8:01:33 PM	BCl3 valve closed
9/9/2010	8:01:33 PM	PH3 valve closed
9/9/2010	8:01:33 PM	SiCl4 pre valve closed
9/9/2010	8:01:33 PM	SiCl4 post valve closed
9/9/2010	8:01:33 PM	Bubbler valve closed
9/9/2010	8:01:33 PM	Main Vac valve opened
9/9/2010	8:01:33 PM	Bypass valve opened
9/9/2010	8:01:33 PM	Helium MFC set to  0.000000
9/9/2010	8:01:33 PM	H2 MFC set to  0.000000
9/9/2010	8:01:33 PM	BCl3 MFC set to  0.000000
9/9/2010	8:01:33 PM	PHl3 MFC set to  0.000000
9/9/2010	8:01:33 PM	SiCl4 MFC set to  0.000000
9/9/2010	8:01:33 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	8:01:34 PM	Tube furnace set to 0
9/9/2010	8:02:34 PM	H2 valve closed
9/9/2010	8:02:34 PM	BCl3 valve closed
9/9/2010	8:02:34 PM	PH3 valve closed
9/9/2010	8:02:34 PM	SiCl4 pre valve closed
9/9/2010	8:02:34 PM	SiCl4 post valve closed
9/9/2010	8:02:34 PM	Bubbler valve closed
9/9/2010	8:02:34 PM	Helium valve opened
9/9/2010	8:02:34 PM	Main Vac valve opened
9/9/2010	8:02:34 PM	Bypass valve opened
9/9/2010	8:02:34 PM	Helium MFC set to  100.000000
9/9/2010	8:02:34 PM	H2 MFC set to  0.000000
9/9/2010	8:02:34 PM	BCl3 MFC set to  0.000000
9/9/2010	8:02:34 PM	PHl3 MFC set to  0.000000
9/9/2010	8:02:34 PM	SiCl4 MFC set to  0.000000
9/9/2010	8:02:34 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	8:02:34 PM	Tube furnace set to 0
9/9/2010	8:03:34 PM	Helium valve closed
9/9/2010	8:03:34 PM	H2 valve closed
9/9/2010	8:03:34 PM	BCl3 valve closed
9/9/2010	8:03:34 PM	PH3 valve closed
9/9/2010	8:03:34 PM	SiCl4 pre valve closed
9/9/2010	8:03:34 PM	SiCl4 post valve closed
9/9/2010	8:03:34 PM	Bubbler valve closed
9/9/2010	8:03:34 PM	Main Vac valve opened
9/9/2010	8:03:34 PM	Bypass valve opened
9/9/2010	8:03:34 PM	Helium MFC set to  0.000000
9/9/2010	8:03:34 PM	H2 MFC set to  0.000000
9/9/2010	8:03:34 PM	BCl3 MFC set to  0.000000
9/9/2010	8:03:34 PM	PHl3 MFC set to  0.000000
9/9/2010	8:03:34 PM	SiCl4 MFC set to  0.000000
9/9/2010	8:03:34 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	8:03:34 PM	Tube furnace set to 0
9/9/2010	8:04:34 PM	H2 valve closed
9/9/2010	8:04:34 PM	BCl3 valve closed
9/9/2010	8:04:34 PM	PH3 valve closed
9/9/2010	8:04:34 PM	SiCl4 pre valve closed
9/9/2010	8:04:34 PM	SiCl4 post valve closed
9/9/2010	8:04:34 PM	Bubbler valve closed
9/9/2010	8:04:34 PM	Helium valve opened
9/9/2010	8:04:34 PM	Main Vac valve opened
9/9/2010	8:04:34 PM	Bypass valve opened
9/9/2010	8:04:34 PM	Helium MFC set to  100.000000
9/9/2010	8:04:34 PM	H2 MFC set to  0.000000
9/9/2010	8:04:34 PM	BCl3 MFC set to  0.000000
9/9/2010	8:04:34 PM	PHl3 MFC set to  0.000000
9/9/2010	8:04:34 PM	SiCl4 MFC set to  0.000000
9/9/2010	8:04:34 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	8:04:34 PM	Tube furnace set to 0
9/9/2010	8:05:34 PM	Helium valve closed
9/9/2010	8:05:34 PM	H2 valve closed
9/9/2010	8:05:34 PM	BCl3 valve closed
9/9/2010	8:05:34 PM	PH3 valve closed
9/9/2010	8:05:34 PM	SiCl4 pre valve closed
9/9/2010	8:05:34 PM	SiCl4 post valve closed
9/9/2010	8:05:34 PM	Bubbler valve closed
9/9/2010	8:05:34 PM	Main Vac valve opened
9/9/2010	8:05:34 PM	Bypass valve opened
9/9/2010	8:05:34 PM	Helium MFC set to  0.000000
9/9/2010	8:05:34 PM	H2 MFC set to  0.000000
9/9/2010	8:05:34 PM	BCl3 MFC set to  0.000000
9/9/2010	8:05:34 PM	PHl3 MFC set to  0.000000
9/9/2010	8:05:34 PM	SiCl4 MFC set to  0.000000
9/9/2010	8:05:34 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	8:05:34 PM	Tube furnace set to 0
9/9/2010	8:06:34 PM	H2 valve closed
9/9/2010	8:06:34 PM	BCl3 valve closed
9/9/2010	8:06:34 PM	PH3 valve closed
9/9/2010	8:06:34 PM	SiCl4 pre valve closed
9/9/2010	8:06:34 PM	SiCl4 post valve closed
9/9/2010	8:06:34 PM	Bubbler valve closed
9/9/2010	8:06:34 PM	Helium valve opened
9/9/2010	8:06:34 PM	Main Vac valve opened
9/9/2010	8:06:34 PM	Bypass valve opened
9/9/2010	8:06:34 PM	Helium MFC set to  100.000000
9/9/2010	8:06:34 PM	H2 MFC set to  0.000000
9/9/2010	8:06:34 PM	BCl3 MFC set to  0.000000
9/9/2010	8:06:34 PM	PHl3 MFC set to  0.000000
9/9/2010	8:06:34 PM	SiCl4 MFC set to  0.000000
9/9/2010	8:06:34 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	8:06:35 PM	Tube furnace set to 0
9/9/2010	8:07:35 PM	Helium valve closed
9/9/2010	8:07:35 PM	H2 valve closed
9/9/2010	8:07:35 PM	BCl3 valve closed
9/9/2010	8:07:35 PM	PH3 valve closed
9/9/2010	8:07:35 PM	SiCl4 pre valve closed
9/9/2010	8:07:35 PM	SiCl4 post valve closed
9/9/2010	8:07:35 PM	Bubbler valve closed
9/9/2010	8:07:35 PM	Main Vac valve opened
9/9/2010	8:07:35 PM	Bypass valve opened
9/9/2010	8:07:35 PM	Helium MFC set to  0.000000
9/9/2010	8:07:35 PM	H2 MFC set to  0.000000
9/9/2010	8:07:35 PM	BCl3 MFC set to  0.000000
9/9/2010	8:07:35 PM	PHl3 MFC set to  0.000000
9/9/2010	8:07:35 PM	SiCl4 MFC set to  0.000000
9/9/2010	8:07:35 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	8:07:35 PM	Tube furnace set to 0
9/9/2010	8:08:35 PM	H2 valve closed
9/9/2010	8:08:35 PM	BCl3 valve closed
9/9/2010	8:08:35 PM	PH3 valve closed
9/9/2010	8:08:35 PM	SiCl4 pre valve closed
9/9/2010	8:08:35 PM	SiCl4 post valve closed
9/9/2010	8:08:35 PM	Bubbler valve closed
9/9/2010	8:08:35 PM	Helium valve opened
9/9/2010	8:08:35 PM	Main Vac valve opened
9/9/2010	8:08:35 PM	Bypass valve opened
9/9/2010	8:08:35 PM	Helium MFC set to  100.000000
9/9/2010	8:08:35 PM	H2 MFC set to  0.000000
9/9/2010	8:08:35 PM	BCl3 MFC set to  0.000000
9/9/2010	8:08:35 PM	PHl3 MFC set to  0.000000
9/9/2010	8:08:35 PM	SiCl4 MFC set to  0.000000
9/9/2010	8:08:35 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	8:08:35 PM	Tube furnace set to 0
9/9/2010	8:09:35 PM	Helium valve closed
9/9/2010	8:09:35 PM	H2 valve closed
9/9/2010	8:09:35 PM	BCl3 valve closed
9/9/2010	8:09:35 PM	PH3 valve closed
9/9/2010	8:09:35 PM	SiCl4 pre valve closed
9/9/2010	8:09:35 PM	SiCl4 post valve closed
9/9/2010	8:09:35 PM	Bubbler valve closed
9/9/2010	8:09:35 PM	Main Vac valve opened
9/9/2010	8:09:35 PM	Bypass valve opened
9/9/2010	8:09:35 PM	Helium MFC set to  0.000000
9/9/2010	8:09:35 PM	H2 MFC set to  0.000000
9/9/2010	8:09:35 PM	BCl3 MFC set to  0.000000
9/9/2010	8:09:35 PM	PHl3 MFC set to  0.000000
9/9/2010	8:09:35 PM	SiCl4 MFC set to  0.000000
9/9/2010	8:09:35 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	8:09:35 PM	Tube furnace set to 0
9/9/2010	8:09:36 PM	Run finished at 8:09 PM
9/9/2010	8:09:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/9/2010	8:42:10 PM	Helium MFC set to  100.000000
9/9/2010	8:42:11 PM	Helium valve opened
9/9/2010	8:57:10 PM	Helium MFC set to  0.000000
9/9/2010	8:57:10 PM	Helium valve closed
9/9/2010	8:57:54 PM	Bypass valve closed
9/9/2010	8:57:54 PM	Main Vac valve closed
9/9/2010	8:58:07 PM	Main Vac valve opened
9/9/2010	8:58:08 PM	Bypass valve opened
9/9/2010	8:59:54 PM	Recipe started at 8:59 PM
9/9/2010	8:59:54 PM	Helium valve closed
9/9/2010	8:59:54 PM	BCl3 valve closed
9/9/2010	8:59:54 PM	PH3 valve closed
9/9/2010	8:59:54 PM	SiCl4 pre valve closed
9/9/2010	8:59:54 PM	SiCl4 post valve closed
9/9/2010	8:59:54 PM	Main Vac valve closed
9/9/2010	8:59:54 PM	Bypass valve closed
9/9/2010	8:59:54 PM	Bubbler valve closed
9/9/2010	8:59:54 PM	H2 valve opened
9/9/2010	8:59:54 PM	Helium MFC set to  0.000000
9/9/2010	8:59:54 PM	H2 MFC set to  500.000000
9/9/2010	8:59:54 PM	BCl3 MFC set to  0.000000
9/9/2010	8:59:54 PM	PHl3 MFC set to  0.000000
9/9/2010	8:59:54 PM	SiCl4 MFC set to  0.000000
9/9/2010	8:59:54 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	8:59:54 PM	Tube furnace set to 0
9/9/2010	9:01:14 PM	Helium valve closed
9/9/2010	9:01:14 PM	BCl3 valve closed
9/9/2010	9:01:14 PM	PH3 valve closed
9/9/2010	9:01:14 PM	SiCl4 pre valve closed
9/9/2010	9:01:14 PM	SiCl4 post valve closed
9/9/2010	9:01:14 PM	Main Vac valve closed
9/9/2010	9:01:14 PM	Bypass valve closed
9/9/2010	9:01:14 PM	H2 valve opened
9/9/2010	9:01:14 PM	Bubbler valve opened
9/9/2010	9:01:14 PM	Helium MFC set to  0.000000
9/9/2010	9:01:14 PM	H2 MFC set to  500.000000
9/9/2010	9:01:14 PM	BCl3 MFC set to  0.000000
9/9/2010	9:01:14 PM	PHl3 MFC set to  0.000000
9/9/2010	9:01:14 PM	SiCl4 MFC set to  0.000000
9/9/2010	9:01:14 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	9:01:14 PM	Tube furnace set to 1000
9/9/2010	9:21:14 PM	Helium valve closed
9/9/2010	9:21:14 PM	BCl3 valve closed
9/9/2010	9:21:14 PM	Main Vac valve closed
9/9/2010	9:21:14 PM	Bypass valve closed
9/9/2010	9:21:14 PM	H2 valve opened
9/9/2010	9:21:14 PM	PH3 valve opened
9/9/2010	9:21:14 PM	SiCl4 pre valve opened
9/9/2010	9:21:14 PM	SiCl4 post valve opened
9/9/2010	9:21:14 PM	Bubbler valve opened
9/9/2010	9:21:14 PM	Helium MFC set to  0.000000
9/9/2010	9:21:14 PM	H2 MFC set to  500.000000
9/9/2010	9:21:14 PM	BCl3 MFC set to  0.000000
9/9/2010	9:21:14 PM	PHl3 MFC set to  1.000000
9/9/2010	9:21:14 PM	SiCl4 MFC set to  50.000000
9/9/2010	9:21:14 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	9:21:15 PM	Tube furnace set to 1000
9/9/2010	9:41:15 PM	H2 valve closed
9/9/2010	9:41:15 PM	BCl3 valve closed
9/9/2010	9:41:15 PM	PH3 valve closed
9/9/2010	9:41:15 PM	SiCl4 pre valve closed
9/9/2010	9:41:15 PM	SiCl4 post valve closed
9/9/2010	9:41:15 PM	Main Vac valve closed
9/9/2010	9:41:15 PM	Bypass valve closed
9/9/2010	9:41:15 PM	Helium valve opened
9/9/2010	9:41:15 PM	Bubbler valve opened
9/9/2010	9:41:15 PM	Helium MFC set to  500.000000
9/9/2010	9:41:15 PM	H2 MFC set to  0.000000
9/9/2010	9:41:15 PM	BCl3 MFC set to  0.000000
9/9/2010	9:41:15 PM	PHl3 MFC set to  0.000000
9/9/2010	9:41:15 PM	SiCl4 MFC set to  0.000000
9/9/2010	9:41:15 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	9:41:15 PM	Tube furnace set to 0
9/9/2010	10:01:15 PM	Helium valve closed
9/9/2010	10:01:15 PM	H2 valve closed
9/9/2010	10:01:15 PM	BCl3 valve closed
9/9/2010	10:01:15 PM	PH3 valve closed
9/9/2010	10:01:15 PM	SiCl4 pre valve closed
9/9/2010	10:01:15 PM	SiCl4 post valve closed
9/9/2010	10:01:15 PM	Main Vac valve closed
9/9/2010	10:01:15 PM	Bypass valve closed
9/9/2010	10:01:15 PM	Bubbler valve closed
9/9/2010	10:01:15 PM	Helium MFC set to  0.000000
9/9/2010	10:01:15 PM	H2 MFC set to  0.000000
9/9/2010	10:01:15 PM	BCl3 MFC set to  0.000000
9/9/2010	10:01:15 PM	PHl3 MFC set to  0.000000
9/9/2010	10:01:15 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:01:15 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:01:15 PM	Tube furnace set to 0
9/9/2010	10:01:15 PM	Run finished at 10:01 PM
9/9/2010	10:04:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/9/2010	10:04:03 PM	Recipe started at 10:04 PM
9/9/2010	10:04:03 PM	Helium valve closed
9/9/2010	10:04:03 PM	H2 valve closed
9/9/2010	10:04:03 PM	BCl3 valve closed
9/9/2010	10:04:03 PM	PH3 valve closed
9/9/2010	10:04:03 PM	SiCl4 pre valve closed
9/9/2010	10:04:03 PM	SiCl4 post valve closed
9/9/2010	10:04:03 PM	Main Vac valve closed
9/9/2010	10:04:03 PM	Bubbler valve closed
9/9/2010	10:04:03 PM	Bypass valve opened
9/9/2010	10:04:03 PM	Helium MFC set to  0.000000
9/9/2010	10:04:03 PM	H2 MFC set to  0.000000
9/9/2010	10:04:03 PM	BCl3 MFC set to  0.000000
9/9/2010	10:04:03 PM	PHl3 MFC set to  0.000000
9/9/2010	10:04:03 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:04:03 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:04:03 PM	Tube furnace set to 0
9/9/2010	10:04:43 PM	Helium valve closed
9/9/2010	10:04:43 PM	H2 valve closed
9/9/2010	10:04:43 PM	BCl3 valve closed
9/9/2010	10:04:43 PM	PH3 valve closed
9/9/2010	10:04:43 PM	SiCl4 pre valve closed
9/9/2010	10:04:43 PM	SiCl4 post valve closed
9/9/2010	10:04:43 PM	Bubbler valve closed
9/9/2010	10:04:43 PM	Main Vac valve opened
9/9/2010	10:04:43 PM	Bypass valve opened
9/9/2010	10:04:43 PM	Helium MFC set to  0.000000
9/9/2010	10:04:43 PM	H2 MFC set to  0.000000
9/9/2010	10:04:43 PM	BCl3 MFC set to  0.000000
9/9/2010	10:04:43 PM	PHl3 MFC set to  0.000000
9/9/2010	10:04:43 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:04:43 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:04:43 PM	Tube furnace set to 0
9/9/2010	10:04:43 PM	Run finished at 10:04 PM
9/9/2010	10:04:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/9/2010	10:17:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/9/2010	10:17:27 PM	Recipe started at 10:17 PM
9/9/2010	10:17:27 PM	H2 valve closed
9/9/2010	10:17:27 PM	BCl3 valve closed
9/9/2010	10:17:27 PM	PH3 valve closed
9/9/2010	10:17:27 PM	SiCl4 pre valve closed
9/9/2010	10:17:27 PM	SiCl4 post valve closed
9/9/2010	10:17:27 PM	Main Vac valve closed
9/9/2010	10:17:27 PM	Bypass valve closed
9/9/2010	10:17:27 PM	Bubbler valve closed
9/9/2010	10:17:27 PM	Helium valve opened
9/9/2010	10:17:27 PM	Helium MFC set to  500.000000
9/9/2010	10:17:27 PM	H2 MFC set to  0.000000
9/9/2010	10:17:27 PM	BCl3 MFC set to  0.000000
9/9/2010	10:17:27 PM	PHl3 MFC set to  0.000000
9/9/2010	10:17:27 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:17:27 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:17:28 PM	Tube furnace set to 0
9/9/2010	10:26:45 PM	Helium valve closed
9/9/2010	10:26:45 PM	H2 valve closed
9/9/2010	10:26:45 PM	BCl3 valve closed
9/9/2010	10:26:45 PM	PH3 valve closed
9/9/2010	10:26:45 PM	SiCl4 pre valve closed
9/9/2010	10:26:45 PM	SiCl4 post valve closed
9/9/2010	10:26:45 PM	Main Vac valve closed
9/9/2010	10:26:45 PM	Bypass valve closed
9/9/2010	10:26:45 PM	Bubbler valve closed
9/9/2010	10:26:45 PM	Helium MFC set to  0.000000
9/9/2010	10:26:45 PM	H2 MFC set to  0.000000
9/9/2010	10:26:45 PM	BCl3 MFC set to  0.000000
9/9/2010	10:26:45 PM	PHl3 MFC set to  0.000000
9/9/2010	10:26:45 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:26:45 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:26:45 PM	Tube furnace set to 0
9/9/2010	10:26:45 PM	Run finished at 10:26 PM
9/9/2010	10:26:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/9/2010	10:27:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/9/2010	10:27:00 PM	Recipe started at 10:27 PM
9/9/2010	10:27:00 PM	Helium valve closed
9/9/2010	10:27:00 PM	H2 valve closed
9/9/2010	10:27:00 PM	BCl3 valve closed
9/9/2010	10:27:00 PM	PH3 valve closed
9/9/2010	10:27:00 PM	SiCl4 pre valve closed
9/9/2010	10:27:00 PM	SiCl4 post valve closed
9/9/2010	10:27:00 PM	Main Vac valve closed
9/9/2010	10:27:00 PM	Bubbler valve closed
9/9/2010	10:27:00 PM	Bypass valve opened
9/9/2010	10:27:00 PM	Helium MFC set to  0.000000
9/9/2010	10:27:00 PM	H2 MFC set to  0.000000
9/9/2010	10:27:00 PM	BCl3 MFC set to  0.000000
9/9/2010	10:27:00 PM	PHl3 MFC set to  0.000000
9/9/2010	10:27:00 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:27:00 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:27:01 PM	Tube furnace set to 0
9/9/2010	10:28:37 PM	Helium valve closed
9/9/2010	10:28:37 PM	H2 valve closed
9/9/2010	10:28:37 PM	BCl3 valve closed
9/9/2010	10:28:37 PM	PH3 valve closed
9/9/2010	10:28:37 PM	SiCl4 pre valve closed
9/9/2010	10:28:37 PM	SiCl4 post valve closed
9/9/2010	10:28:37 PM	Bubbler valve closed
9/9/2010	10:28:37 PM	Main Vac valve opened
9/9/2010	10:28:37 PM	Bypass valve opened
9/9/2010	10:28:37 PM	Helium MFC set to  0.000000
9/9/2010	10:28:37 PM	H2 MFC set to  0.000000
9/9/2010	10:28:37 PM	BCl3 MFC set to  0.000000
9/9/2010	10:28:37 PM	PHl3 MFC set to  0.000000
9/9/2010	10:28:37 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:28:37 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:28:37 PM	Tube furnace set to 0
9/9/2010	10:28:37 PM	Run finished at 10:28 PM
9/9/2010	10:28:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/9/2010	10:30:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/9/2010	10:30:48 PM	Recipe started at 10:30 PM
9/9/2010	10:30:48 PM	Helium valve closed
9/9/2010	10:30:48 PM	H2 valve closed
9/9/2010	10:30:48 PM	BCl3 valve closed
9/9/2010	10:30:48 PM	PH3 valve closed
9/9/2010	10:30:48 PM	SiCl4 pre valve closed
9/9/2010	10:30:48 PM	SiCl4 post valve closed
9/9/2010	10:30:48 PM	Main Vac valve closed
9/9/2010	10:30:48 PM	Bubbler valve closed
9/9/2010	10:30:48 PM	Bypass valve opened
9/9/2010	10:30:48 PM	Helium MFC set to  0.000000
9/9/2010	10:30:48 PM	H2 MFC set to  0.000000
9/9/2010	10:30:48 PM	BCl3 MFC set to  0.000000
9/9/2010	10:30:48 PM	PHl3 MFC set to  0.000000
9/9/2010	10:30:48 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:30:48 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:30:48 PM	Tube furnace set to 0
9/9/2010	10:30:49 PM	Helium valve closed
9/9/2010	10:30:49 PM	H2 valve closed
9/9/2010	10:30:49 PM	BCl3 valve closed
9/9/2010	10:30:49 PM	PH3 valve closed
9/9/2010	10:30:49 PM	SiCl4 pre valve closed
9/9/2010	10:30:49 PM	SiCl4 post valve closed
9/9/2010	10:30:49 PM	Bubbler valve closed
9/9/2010	10:30:49 PM	Main Vac valve opened
9/9/2010	10:30:49 PM	Bypass valve opened
9/9/2010	10:30:49 PM	Helium MFC set to  0.000000
9/9/2010	10:30:49 PM	H2 MFC set to  0.000000
9/9/2010	10:30:49 PM	BCl3 MFC set to  0.000000
9/9/2010	10:30:49 PM	PHl3 MFC set to  0.000000
9/9/2010	10:30:49 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:30:49 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:30:49 PM	Tube furnace set to 0
9/9/2010	10:31:49 PM	H2 valve closed
9/9/2010	10:31:49 PM	BCl3 valve closed
9/9/2010	10:31:49 PM	PH3 valve closed
9/9/2010	10:31:49 PM	SiCl4 pre valve closed
9/9/2010	10:31:49 PM	SiCl4 post valve closed
9/9/2010	10:31:49 PM	Bubbler valve closed
9/9/2010	10:31:49 PM	Helium valve opened
9/9/2010	10:31:49 PM	Main Vac valve opened
9/9/2010	10:31:49 PM	Bypass valve opened
9/9/2010	10:31:49 PM	Helium MFC set to  100.000000
9/9/2010	10:31:49 PM	H2 MFC set to  0.000000
9/9/2010	10:31:49 PM	BCl3 MFC set to  0.000000
9/9/2010	10:31:49 PM	PHl3 MFC set to  0.000000
9/9/2010	10:31:49 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:31:49 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:31:49 PM	Tube furnace set to 0
9/9/2010	10:32:49 PM	Helium valve closed
9/9/2010	10:32:49 PM	H2 valve closed
9/9/2010	10:32:49 PM	BCl3 valve closed
9/9/2010	10:32:49 PM	PH3 valve closed
9/9/2010	10:32:49 PM	SiCl4 pre valve closed
9/9/2010	10:32:49 PM	SiCl4 post valve closed
9/9/2010	10:32:49 PM	Bubbler valve closed
9/9/2010	10:32:49 PM	Main Vac valve opened
9/9/2010	10:32:49 PM	Bypass valve opened
9/9/2010	10:32:49 PM	Helium MFC set to  0.000000
9/9/2010	10:32:49 PM	H2 MFC set to  0.000000
9/9/2010	10:32:49 PM	BCl3 MFC set to  0.000000
9/9/2010	10:32:49 PM	PHl3 MFC set to  0.000000
9/9/2010	10:32:49 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:32:49 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:32:49 PM	Tube furnace set to 0
9/9/2010	10:33:05 PM	Run aborted at 10:33 PM
9/9/2010	10:33:05 PM	Helium valve closed
9/9/2010	10:33:05 PM	H2 valve closed
9/9/2010	10:33:05 PM	BCl3 valve closed
9/9/2010	10:33:05 PM	PH3 valve closed
9/9/2010	10:33:05 PM	SiCl4 pre valve closed
9/9/2010	10:33:05 PM	SiCl4 post valve closed
9/9/2010	10:33:05 PM	Bypass valve closed
9/9/2010	10:33:05 PM	Main Vac valve closed
9/9/2010	10:33:05 PM	Bubbler valve closed
9/9/2010	10:33:05 PM	Helium MFC set to  0.000000
9/9/2010	10:33:05 PM	H2 MFC set to  0.000000
9/9/2010	10:33:05 PM	BCl3 MFC set to  0.000000
9/9/2010	10:33:05 PM	PHl3 MFC set to  0.000000
9/9/2010	10:33:05 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:33:06 PM	Tube furnace set to 0
9/9/2010	10:33:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/9/2010	10:33:08 PM	Bypass valve opened
9/9/2010	10:33:08 PM	Main Vac valve opened
9/9/2010	10:33:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/9/2010	10:33:39 PM	Recipe started at 10:33 PM
9/9/2010	10:33:39 PM	Helium valve closed
9/9/2010	10:33:39 PM	H2 valve closed
9/9/2010	10:33:39 PM	BCl3 valve closed
9/9/2010	10:33:39 PM	PH3 valve closed
9/9/2010	10:33:39 PM	SiCl4 pre valve closed
9/9/2010	10:33:39 PM	SiCl4 post valve closed
9/9/2010	10:33:39 PM	Main Vac valve closed
9/9/2010	10:33:39 PM	Bubbler valve closed
9/9/2010	10:33:39 PM	Bypass valve opened
9/9/2010	10:33:39 PM	Helium MFC set to  0.000000
9/9/2010	10:33:39 PM	H2 MFC set to  0.000000
9/9/2010	10:33:39 PM	BCl3 MFC set to  0.000000
9/9/2010	10:33:39 PM	PHl3 MFC set to  0.000000
9/9/2010	10:33:39 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:33:39 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:33:40 PM	Tube furnace set to 0
9/9/2010	10:33:40 PM	Helium valve closed
9/9/2010	10:33:40 PM	H2 valve closed
9/9/2010	10:33:40 PM	BCl3 valve closed
9/9/2010	10:33:40 PM	PH3 valve closed
9/9/2010	10:33:40 PM	SiCl4 pre valve closed
9/9/2010	10:33:40 PM	SiCl4 post valve closed
9/9/2010	10:33:40 PM	Bubbler valve closed
9/9/2010	10:33:40 PM	Main Vac valve opened
9/9/2010	10:33:40 PM	Bypass valve opened
9/9/2010	10:33:40 PM	Helium MFC set to  0.000000
9/9/2010	10:33:40 PM	H2 MFC set to  0.000000
9/9/2010	10:33:40 PM	BCl3 MFC set to  0.000000
9/9/2010	10:33:40 PM	PHl3 MFC set to  0.000000
9/9/2010	10:33:40 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:33:40 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:33:40 PM	Tube furnace set to 0
9/9/2010	10:34:40 PM	H2 valve closed
9/9/2010	10:34:40 PM	BCl3 valve closed
9/9/2010	10:34:40 PM	PH3 valve closed
9/9/2010	10:34:40 PM	SiCl4 pre valve closed
9/9/2010	10:34:40 PM	SiCl4 post valve closed
9/9/2010	10:34:40 PM	Bubbler valve closed
9/9/2010	10:34:40 PM	Helium valve opened
9/9/2010	10:34:40 PM	Main Vac valve opened
9/9/2010	10:34:40 PM	Bypass valve opened
9/9/2010	10:34:40 PM	Helium MFC set to  100.000000
9/9/2010	10:34:40 PM	H2 MFC set to  0.000000
9/9/2010	10:34:40 PM	BCl3 MFC set to  0.000000
9/9/2010	10:34:40 PM	PHl3 MFC set to  0.000000
9/9/2010	10:34:40 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:34:40 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:34:40 PM	Tube furnace set to 0
9/9/2010	10:35:40 PM	Helium valve closed
9/9/2010	10:35:40 PM	H2 valve closed
9/9/2010	10:35:40 PM	BCl3 valve closed
9/9/2010	10:35:40 PM	PH3 valve closed
9/9/2010	10:35:40 PM	SiCl4 pre valve closed
9/9/2010	10:35:40 PM	SiCl4 post valve closed
9/9/2010	10:35:40 PM	Bubbler valve closed
9/9/2010	10:35:40 PM	Main Vac valve opened
9/9/2010	10:35:40 PM	Bypass valve opened
9/9/2010	10:35:40 PM	Helium MFC set to  0.000000
9/9/2010	10:35:40 PM	H2 MFC set to  0.000000
9/9/2010	10:35:40 PM	BCl3 MFC set to  0.000000
9/9/2010	10:35:40 PM	PHl3 MFC set to  0.000000
9/9/2010	10:35:40 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:35:40 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:35:40 PM	Tube furnace set to 0
9/9/2010	10:36:41 PM	H2 valve closed
9/9/2010	10:36:41 PM	BCl3 valve closed
9/9/2010	10:36:41 PM	PH3 valve closed
9/9/2010	10:36:41 PM	SiCl4 pre valve closed
9/9/2010	10:36:41 PM	SiCl4 post valve closed
9/9/2010	10:36:41 PM	Bubbler valve closed
9/9/2010	10:36:41 PM	Helium valve opened
9/9/2010	10:36:41 PM	Main Vac valve opened
9/9/2010	10:36:41 PM	Bypass valve opened
9/9/2010	10:36:41 PM	Helium MFC set to  100.000000
9/9/2010	10:36:41 PM	H2 MFC set to  0.000000
9/9/2010	10:36:41 PM	BCl3 MFC set to  0.000000
9/9/2010	10:36:41 PM	PHl3 MFC set to  0.000000
9/9/2010	10:36:41 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:36:41 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:36:41 PM	Tube furnace set to 0
9/9/2010	10:37:41 PM	Helium valve closed
9/9/2010	10:37:41 PM	H2 valve closed
9/9/2010	10:37:41 PM	BCl3 valve closed
9/9/2010	10:37:41 PM	PH3 valve closed
9/9/2010	10:37:41 PM	SiCl4 pre valve closed
9/9/2010	10:37:41 PM	SiCl4 post valve closed
9/9/2010	10:37:41 PM	Bubbler valve closed
9/9/2010	10:37:41 PM	Main Vac valve opened
9/9/2010	10:37:41 PM	Bypass valve opened
9/9/2010	10:37:41 PM	Helium MFC set to  0.000000
9/9/2010	10:37:41 PM	H2 MFC set to  0.000000
9/9/2010	10:37:41 PM	BCl3 MFC set to  0.000000
9/9/2010	10:37:41 PM	PHl3 MFC set to  0.000000
9/9/2010	10:37:41 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:37:41 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:37:41 PM	Tube furnace set to 0
9/9/2010	10:38:41 PM	H2 valve closed
9/9/2010	10:38:41 PM	BCl3 valve closed
9/9/2010	10:38:41 PM	PH3 valve closed
9/9/2010	10:38:41 PM	SiCl4 pre valve closed
9/9/2010	10:38:41 PM	SiCl4 post valve closed
9/9/2010	10:38:41 PM	Bubbler valve closed
9/9/2010	10:38:41 PM	Helium valve opened
9/9/2010	10:38:41 PM	Main Vac valve opened
9/9/2010	10:38:41 PM	Bypass valve opened
9/9/2010	10:38:41 PM	Helium MFC set to  100.000000
9/9/2010	10:38:41 PM	H2 MFC set to  0.000000
9/9/2010	10:38:41 PM	BCl3 MFC set to  0.000000
9/9/2010	10:38:41 PM	PHl3 MFC set to  0.000000
9/9/2010	10:38:41 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:38:41 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:38:41 PM	Tube furnace set to 0
9/9/2010	10:39:41 PM	Helium valve closed
9/9/2010	10:39:41 PM	H2 valve closed
9/9/2010	10:39:41 PM	BCl3 valve closed
9/9/2010	10:39:41 PM	PH3 valve closed
9/9/2010	10:39:41 PM	SiCl4 pre valve closed
9/9/2010	10:39:41 PM	SiCl4 post valve closed
9/9/2010	10:39:41 PM	Bubbler valve closed
9/9/2010	10:39:41 PM	Main Vac valve opened
9/9/2010	10:39:41 PM	Bypass valve opened
9/9/2010	10:39:41 PM	Helium MFC set to  0.000000
9/9/2010	10:39:41 PM	H2 MFC set to  0.000000
9/9/2010	10:39:41 PM	BCl3 MFC set to  0.000000
9/9/2010	10:39:41 PM	PHl3 MFC set to  0.000000
9/9/2010	10:39:41 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:39:41 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:39:41 PM	Tube furnace set to 0
9/9/2010	10:40:41 PM	H2 valve closed
9/9/2010	10:40:41 PM	BCl3 valve closed
9/9/2010	10:40:41 PM	PH3 valve closed
9/9/2010	10:40:41 PM	SiCl4 pre valve closed
9/9/2010	10:40:41 PM	SiCl4 post valve closed
9/9/2010	10:40:41 PM	Bubbler valve closed
9/9/2010	10:40:41 PM	Helium valve opened
9/9/2010	10:40:41 PM	Main Vac valve opened
9/9/2010	10:40:41 PM	Bypass valve opened
9/9/2010	10:40:41 PM	Helium MFC set to  100.000000
9/9/2010	10:40:41 PM	H2 MFC set to  0.000000
9/9/2010	10:40:41 PM	BCl3 MFC set to  0.000000
9/9/2010	10:40:41 PM	PHl3 MFC set to  0.000000
9/9/2010	10:40:41 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:40:41 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:40:42 PM	Tube furnace set to 0
9/9/2010	10:41:42 PM	Helium valve closed
9/9/2010	10:41:42 PM	H2 valve closed
9/9/2010	10:41:42 PM	BCl3 valve closed
9/9/2010	10:41:42 PM	PH3 valve closed
9/9/2010	10:41:42 PM	SiCl4 pre valve closed
9/9/2010	10:41:42 PM	SiCl4 post valve closed
9/9/2010	10:41:42 PM	Bubbler valve closed
9/9/2010	10:41:42 PM	Main Vac valve opened
9/9/2010	10:41:42 PM	Bypass valve opened
9/9/2010	10:41:42 PM	Helium MFC set to  0.000000
9/9/2010	10:41:42 PM	H2 MFC set to  0.000000
9/9/2010	10:41:42 PM	BCl3 MFC set to  0.000000
9/9/2010	10:41:42 PM	PHl3 MFC set to  0.000000
9/9/2010	10:41:42 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:41:42 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:41:42 PM	Tube furnace set to 0
9/9/2010	10:42:42 PM	H2 valve closed
9/9/2010	10:42:42 PM	BCl3 valve closed
9/9/2010	10:42:42 PM	PH3 valve closed
9/9/2010	10:42:42 PM	SiCl4 pre valve closed
9/9/2010	10:42:42 PM	SiCl4 post valve closed
9/9/2010	10:42:42 PM	Bubbler valve closed
9/9/2010	10:42:42 PM	Helium valve opened
9/9/2010	10:42:42 PM	Main Vac valve opened
9/9/2010	10:42:42 PM	Bypass valve opened
9/9/2010	10:42:42 PM	Helium MFC set to  100.000000
9/9/2010	10:42:42 PM	H2 MFC set to  0.000000
9/9/2010	10:42:42 PM	BCl3 MFC set to  0.000000
9/9/2010	10:42:42 PM	PHl3 MFC set to  0.000000
9/9/2010	10:42:42 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:42:42 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:42:42 PM	Tube furnace set to 0
9/9/2010	10:43:42 PM	Helium valve closed
9/9/2010	10:43:42 PM	H2 valve closed
9/9/2010	10:43:42 PM	BCl3 valve closed
9/9/2010	10:43:42 PM	PH3 valve closed
9/9/2010	10:43:42 PM	SiCl4 pre valve closed
9/9/2010	10:43:42 PM	SiCl4 post valve closed
9/9/2010	10:43:42 PM	Bubbler valve closed
9/9/2010	10:43:42 PM	Main Vac valve opened
9/9/2010	10:43:42 PM	Bypass valve opened
9/9/2010	10:43:42 PM	Helium MFC set to  0.000000
9/9/2010	10:43:42 PM	H2 MFC set to  0.000000
9/9/2010	10:43:42 PM	BCl3 MFC set to  0.000000
9/9/2010	10:43:42 PM	PHl3 MFC set to  0.000000
9/9/2010	10:43:42 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:43:42 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:43:42 PM	Tube furnace set to 0
9/9/2010	10:44:42 PM	H2 valve closed
9/9/2010	10:44:42 PM	BCl3 valve closed
9/9/2010	10:44:42 PM	PH3 valve closed
9/9/2010	10:44:42 PM	SiCl4 pre valve closed
9/9/2010	10:44:42 PM	SiCl4 post valve closed
9/9/2010	10:44:42 PM	Bubbler valve closed
9/9/2010	10:44:42 PM	Helium valve opened
9/9/2010	10:44:42 PM	Main Vac valve opened
9/9/2010	10:44:42 PM	Bypass valve opened
9/9/2010	10:44:42 PM	Helium MFC set to  100.000000
9/9/2010	10:44:42 PM	H2 MFC set to  0.000000
9/9/2010	10:44:42 PM	BCl3 MFC set to  0.000000
9/9/2010	10:44:42 PM	PHl3 MFC set to  0.000000
9/9/2010	10:44:42 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:44:42 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:44:42 PM	Tube furnace set to 0
9/9/2010	10:45:42 PM	Helium valve closed
9/9/2010	10:45:42 PM	H2 valve closed
9/9/2010	10:45:42 PM	BCl3 valve closed
9/9/2010	10:45:42 PM	PH3 valve closed
9/9/2010	10:45:42 PM	SiCl4 pre valve closed
9/9/2010	10:45:42 PM	SiCl4 post valve closed
9/9/2010	10:45:42 PM	Bubbler valve closed
9/9/2010	10:45:42 PM	Main Vac valve opened
9/9/2010	10:45:42 PM	Bypass valve opened
9/9/2010	10:45:42 PM	Helium MFC set to  0.000000
9/9/2010	10:45:42 PM	H2 MFC set to  0.000000
9/9/2010	10:45:42 PM	BCl3 MFC set to  0.000000
9/9/2010	10:45:42 PM	PHl3 MFC set to  0.000000
9/9/2010	10:45:42 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:45:42 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:45:43 PM	Tube furnace set to 0
9/9/2010	10:46:43 PM	H2 valve closed
9/9/2010	10:46:43 PM	BCl3 valve closed
9/9/2010	10:46:43 PM	PH3 valve closed
9/9/2010	10:46:43 PM	SiCl4 pre valve closed
9/9/2010	10:46:43 PM	SiCl4 post valve closed
9/9/2010	10:46:43 PM	Bubbler valve closed
9/9/2010	10:46:43 PM	Helium valve opened
9/9/2010	10:46:43 PM	Main Vac valve opened
9/9/2010	10:46:43 PM	Bypass valve opened
9/9/2010	10:46:43 PM	Helium MFC set to  100.000000
9/9/2010	10:46:43 PM	H2 MFC set to  0.000000
9/9/2010	10:46:43 PM	BCl3 MFC set to  0.000000
9/9/2010	10:46:43 PM	PHl3 MFC set to  0.000000
9/9/2010	10:46:43 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:46:43 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:46:43 PM	Tube furnace set to 0
9/9/2010	10:47:43 PM	Helium valve closed
9/9/2010	10:47:43 PM	H2 valve closed
9/9/2010	10:47:43 PM	BCl3 valve closed
9/9/2010	10:47:43 PM	PH3 valve closed
9/9/2010	10:47:43 PM	SiCl4 pre valve closed
9/9/2010	10:47:43 PM	SiCl4 post valve closed
9/9/2010	10:47:43 PM	Bubbler valve closed
9/9/2010	10:47:43 PM	Main Vac valve opened
9/9/2010	10:47:43 PM	Bypass valve opened
9/9/2010	10:47:43 PM	Helium MFC set to  0.000000
9/9/2010	10:47:43 PM	H2 MFC set to  0.000000
9/9/2010	10:47:43 PM	BCl3 MFC set to  0.000000
9/9/2010	10:47:43 PM	PHl3 MFC set to  0.000000
9/9/2010	10:47:43 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:47:43 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:47:43 PM	Tube furnace set to 0
9/9/2010	10:48:43 PM	H2 valve closed
9/9/2010	10:48:43 PM	BCl3 valve closed
9/9/2010	10:48:43 PM	PH3 valve closed
9/9/2010	10:48:43 PM	SiCl4 pre valve closed
9/9/2010	10:48:43 PM	SiCl4 post valve closed
9/9/2010	10:48:43 PM	Bubbler valve closed
9/9/2010	10:48:43 PM	Helium valve opened
9/9/2010	10:48:43 PM	Main Vac valve opened
9/9/2010	10:48:43 PM	Bypass valve opened
9/9/2010	10:48:43 PM	Helium MFC set to  100.000000
9/9/2010	10:48:43 PM	H2 MFC set to  0.000000
9/9/2010	10:48:43 PM	BCl3 MFC set to  0.000000
9/9/2010	10:48:43 PM	PHl3 MFC set to  0.000000
9/9/2010	10:48:43 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:48:43 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:48:43 PM	Tube furnace set to 0
9/9/2010	10:49:43 PM	Helium valve closed
9/9/2010	10:49:43 PM	H2 valve closed
9/9/2010	10:49:43 PM	BCl3 valve closed
9/9/2010	10:49:43 PM	PH3 valve closed
9/9/2010	10:49:43 PM	SiCl4 pre valve closed
9/9/2010	10:49:43 PM	SiCl4 post valve closed
9/9/2010	10:49:43 PM	Bubbler valve closed
9/9/2010	10:49:43 PM	Main Vac valve opened
9/9/2010	10:49:43 PM	Bypass valve opened
9/9/2010	10:49:43 PM	Helium MFC set to  0.000000
9/9/2010	10:49:43 PM	H2 MFC set to  0.000000
9/9/2010	10:49:43 PM	BCl3 MFC set to  0.000000
9/9/2010	10:49:43 PM	PHl3 MFC set to  0.000000
9/9/2010	10:49:43 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:49:43 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:49:44 PM	Tube furnace set to 0
9/9/2010	10:50:44 PM	H2 valve closed
9/9/2010	10:50:44 PM	BCl3 valve closed
9/9/2010	10:50:44 PM	PH3 valve closed
9/9/2010	10:50:44 PM	SiCl4 pre valve closed
9/9/2010	10:50:44 PM	SiCl4 post valve closed
9/9/2010	10:50:44 PM	Bubbler valve closed
9/9/2010	10:50:44 PM	Helium valve opened
9/9/2010	10:50:44 PM	Main Vac valve opened
9/9/2010	10:50:44 PM	Bypass valve opened
9/9/2010	10:50:44 PM	Helium MFC set to  100.000000
9/9/2010	10:50:44 PM	H2 MFC set to  0.000000
9/9/2010	10:50:44 PM	BCl3 MFC set to  0.000000
9/9/2010	10:50:44 PM	PHl3 MFC set to  0.000000
9/9/2010	10:50:44 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:50:44 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:50:44 PM	Tube furnace set to 0
9/9/2010	10:51:44 PM	Helium valve closed
9/9/2010	10:51:44 PM	H2 valve closed
9/9/2010	10:51:44 PM	BCl3 valve closed
9/9/2010	10:51:44 PM	PH3 valve closed
9/9/2010	10:51:44 PM	SiCl4 pre valve closed
9/9/2010	10:51:44 PM	SiCl4 post valve closed
9/9/2010	10:51:44 PM	Bubbler valve closed
9/9/2010	10:51:44 PM	Main Vac valve opened
9/9/2010	10:51:44 PM	Bypass valve opened
9/9/2010	10:51:44 PM	Helium MFC set to  0.000000
9/9/2010	10:51:44 PM	H2 MFC set to  0.000000
9/9/2010	10:51:44 PM	BCl3 MFC set to  0.000000
9/9/2010	10:51:44 PM	PHl3 MFC set to  0.000000
9/9/2010	10:51:44 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:51:44 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:51:44 PM	Tube furnace set to 0
9/9/2010	10:52:44 PM	H2 valve closed
9/9/2010	10:52:44 PM	BCl3 valve closed
9/9/2010	10:52:44 PM	PH3 valve closed
9/9/2010	10:52:44 PM	SiCl4 pre valve closed
9/9/2010	10:52:44 PM	SiCl4 post valve closed
9/9/2010	10:52:44 PM	Bubbler valve closed
9/9/2010	10:52:44 PM	Helium valve opened
9/9/2010	10:52:44 PM	Main Vac valve opened
9/9/2010	10:52:44 PM	Bypass valve opened
9/9/2010	10:52:44 PM	Helium MFC set to  100.000000
9/9/2010	10:52:44 PM	H2 MFC set to  0.000000
9/9/2010	10:52:44 PM	BCl3 MFC set to  0.000000
9/9/2010	10:52:44 PM	PHl3 MFC set to  0.000000
9/9/2010	10:52:44 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:52:44 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:52:44 PM	Tube furnace set to 0
9/9/2010	10:53:44 PM	Helium valve closed
9/9/2010	10:53:44 PM	H2 valve closed
9/9/2010	10:53:44 PM	BCl3 valve closed
9/9/2010	10:53:44 PM	PH3 valve closed
9/9/2010	10:53:44 PM	SiCl4 pre valve closed
9/9/2010	10:53:44 PM	SiCl4 post valve closed
9/9/2010	10:53:44 PM	Bubbler valve closed
9/9/2010	10:53:44 PM	Main Vac valve opened
9/9/2010	10:53:44 PM	Bypass valve opened
9/9/2010	10:53:44 PM	Helium MFC set to  0.000000
9/9/2010	10:53:44 PM	H2 MFC set to  0.000000
9/9/2010	10:53:44 PM	BCl3 MFC set to  0.000000
9/9/2010	10:53:44 PM	PHl3 MFC set to  0.000000
9/9/2010	10:53:44 PM	SiCl4 MFC set to  0.000000
9/9/2010	10:53:44 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	10:53:44 PM	Tube furnace set to 0
9/9/2010	10:53:45 PM	Run finished at 10:53 PM
9/9/2010	10:53:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/9/2010	11:20:05 PM	Helium valve opened
9/9/2010	11:20:06 PM	Helium valve closed
9/9/2010	11:20:13 PM	Helium MFC set to  100.000000
9/9/2010	11:20:14 PM	Helium valve opened
9/9/2010	11:37:32 PM	Helium valve closed
9/9/2010	11:37:37 PM	Helium MFC set to  0.000000
9/9/2010	11:38:31 PM	Bypass valve closed
9/9/2010	11:38:32 PM	Main Vac valve closed
9/9/2010	11:39:38 PM	Recipe started at 11:39 PM
9/9/2010	11:39:38 PM	Helium valve closed
9/9/2010	11:39:38 PM	BCl3 valve closed
9/9/2010	11:39:38 PM	PH3 valve closed
9/9/2010	11:39:38 PM	SiCl4 pre valve closed
9/9/2010	11:39:38 PM	SiCl4 post valve closed
9/9/2010	11:39:38 PM	Main Vac valve closed
9/9/2010	11:39:38 PM	Bypass valve closed
9/9/2010	11:39:38 PM	Bubbler valve closed
9/9/2010	11:39:38 PM	H2 valve opened
9/9/2010	11:39:38 PM	Helium MFC set to  0.000000
9/9/2010	11:39:38 PM	H2 MFC set to  500.000000
9/9/2010	11:39:38 PM	BCl3 MFC set to  0.000000
9/9/2010	11:39:38 PM	PHl3 MFC set to  0.000000
9/9/2010	11:39:38 PM	SiCl4 MFC set to  0.000000
9/9/2010	11:39:38 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	11:39:38 PM	Tube furnace set to 0
9/9/2010	11:40:58 PM	Helium valve closed
9/9/2010	11:40:58 PM	BCl3 valve closed
9/9/2010	11:40:58 PM	PH3 valve closed
9/9/2010	11:40:58 PM	SiCl4 pre valve closed
9/9/2010	11:40:58 PM	SiCl4 post valve closed
9/9/2010	11:40:58 PM	Main Vac valve closed
9/9/2010	11:40:58 PM	Bypass valve closed
9/9/2010	11:40:58 PM	H2 valve opened
9/9/2010	11:40:58 PM	Bubbler valve opened
9/9/2010	11:40:58 PM	Helium MFC set to  0.000000
9/9/2010	11:40:58 PM	H2 MFC set to  500.000000
9/9/2010	11:40:58 PM	BCl3 MFC set to  0.000000
9/9/2010	11:40:58 PM	PHl3 MFC set to  0.000000
9/9/2010	11:40:58 PM	SiCl4 MFC set to  0.000000
9/9/2010	11:40:58 PM	Bypass solenoid MFC set to  0.000000
9/9/2010	11:40:59 PM	Tube furnace set to 1000
